Sputtering targets are made through various manufacturing processes that depend on the material's properties and its intended application.
Common methods include vacuum melting and casting, hot-pressing, cold-pressing and sintering, and special press-sintered processes.
These processes ensure the production of high-quality, chemically pure, and metallurgically uniform targets used in sputter deposition for creating thin films.
4 Essential Manufacturing Processes Explained
1. Vacuum Melting and Casting
This process involves melting the raw materials in a vacuum to prevent contamination and then casting them into the desired shape.
This method is particularly effective for materials that require high purity.
2. Hot-Pressing and Cold-Pressing with Sintering
These methods involve pressing powdered materials at high or room temperatures, followed by sintering to bond the particles together.
Hot-pressing typically achieves higher densities and better mechanical properties.
3. Special Press-Sintered Process
This is a tailored process for specific materials that require unique conditions for optimal densification and bonding.
4. Vacuum Hot-Pressing
Similar to hot-pressing, but conducted in a vacuum to enhance purity and prevent oxidation.
Shape and Size
Sputtering targets can be fabricated into various shapes and sizes, commonly circular or rectangular.
However, technical limitations may necessitate the production of multi-segmented targets, which are then joined using butt or bevelled joints.
Quality Assurance
Each production lot undergoes rigorous analytical processes to ensure compliance with high-quality standards.
A certificate of analysis accompanies each shipment, guaranteeing the material's properties and purity.
Application in Thin Film Deposition
Sputtering targets are crucial in sputter deposition, a technique used to produce thin films for applications such as semiconductors, solar cells, and optical components.
The targets, made of pure metals, alloys, or compounds, are bombarded with gaseous ions, causing particles to be ejected and deposited onto a substrate, forming a thin film.
Recycling
Sputtering targets are a valuable source of precious metal scrap due to their composition and the high-value applications they serve, such as in semiconductors and computer chips.
Recycling these targets not only conserves resources but also reduces costs in the production of new materials.
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