The thickness of a sputtering target can vary depending on the material being used and the nature of the thin film being created.
For magnetron sputtering of magnetic materials like Nickel, a thinner target is used, usually a foil or sheet less than 1 mm thick.
For normal metal targets, a thickness of up to 4 to 5 mm is considered acceptable. The same applies to oxide targets.
The size and shape of sputtering targets can also vary greatly. The smallest targets can be less than one inch (2.5 cm) in diameter, while the largest rectangular targets can reach well over one yard (0.9 m) in length. In some cases, larger targets may be required, and manufacturers can create segmented targets connected by special joints.
Commonly used shapes for sputtering targets are circular and rectangular, although other shapes like square and triangular designs can also be produced.
The standard sizes for round targets range from 1" to 20" in diameter, and rectangular targets can be available in lengths up to and over 2000mm, depending on the metal and whether it is a single or multiple piece construction.
The fabrication methods for sputtering targets depend on the properties of the target material and its application. Vacuum melting and rolling, hot-pressed, special press-sintered process, vacuum hot-pressed, and forged methods can be used.
Sputtering targets are typically solid slabs made of pure metals, alloys, or compounds such as oxides or nitrides. The thickness of coatings deposited by sputtering is usually in the range of angstroms to microns. The thin film can be a single material or multiple materials in a layered structure.
Reactive sputtering is another process where a non-inert gas like oxygen is used in combination with an elemental target material to create a chemical reaction and form a new compound film.
In summary, the thickness of a sputtering target can vary depending on the material and application, ranging from less than 1 mm for magnetic materials to up to 4 to 5 mm for normal metal and oxide targets. The size and shape of sputtering targets can also vary greatly, with round targets ranging from 1" to 20" in diameter and rectangular targets available in lengths up to and over 2000mm.
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