The thickness of a sputtering target is not explicitly mentioned in the provided references, but we can infer some relevant information. Sputtering targets are typically solid slabs made of high-quality materials like metals, alloys, or ceramics, and their dimensions are tool-specific. While the references focus more on the properties and applications of sputtering targets, such as purity, density, and surface roughness, they do not directly state the thickness of the targets. However, the thickness of the coatings produced by sputtering is mentioned to range from angstroms to microns, which is significantly thinner than the target itself. For precise thickness specifications, one would need to consult manufacturer datasheets or industry standards.
Key Points Explained:
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Definition and Composition of Sputtering Targets:
- Sputtering targets are solid slabs made of materials like pure metals, alloys, or compounds (e.g., oxides or nitrides).
- They are used in the sputtering process to produce thin films on substrates.
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Shape and Size of Sputtering Targets:
- Targets can be flat or cylindrical, with their exact dimensions being tool-specific.
- Flat targets are more common and cost-effective, while ring-shaped targets are used in specific chamber designs.
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Material Quality and Requirements:
- Sputtering targets must be high-quality, free of cracks, and meet stringent standards for purity, density, grain size, and surface roughness.
- These requirements ensure the production of contamination-free thin films.
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Thickness of Coatings vs. Targets:
- The references mention that the thickness of coatings produced by sputtering ranges from angstroms to microns.
- This is significantly thinner than the target itself, indicating that the target must be much thicker to serve as a durable source material.
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Inference on Target Thickness:
- While the exact thickness of sputtering targets is not specified, they are typically solid slabs designed to withstand the sputtering process.
- The thickness likely depends on the application, material type, and tool requirements.
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Practical Considerations for Purchasers:
- When purchasing sputtering targets, consider the tool-specific dimensions, material quality, and application requirements.
- For precise thickness specifications, consult manufacturer datasheets or industry standards, as the references provided do not specify this detail.
By focusing on the properties and applications of sputtering targets, we can infer that their thickness is tailored to the specific needs of the sputtering process and the equipment used. For exact measurements, further research or consultation with manufacturers is recommended.
Summary Table:
| Aspect | Details |
|---|---|
| Composition | Metals, alloys, or ceramics (e.g., oxides, nitrides) |
| Shape & Size | Flat or cylindrical; dimensions are tool-specific |
| Material Quality | High purity, density, grain size, and surface roughness |
| Coating Thickness | Ranges from angstroms to microns (much thinner than the target itself) |
| Target Thickness | Not explicitly stated; inferred to be thicker and tool-specific |
| Purchasing Tips | Consult manufacturer datasheets or industry standards for precise details |
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