The inert gas commonly used in sputtering is argon.
Argon is preferred due to its high sputtering rate, inert nature, low price, and availability of pure gas.
5 Key Reasons Argon is the Preferred Inert Gas in Sputtering
1. Inert Nature
Argon is an inert gas, meaning it does not react chemically with the target material.
This is crucial in sputtering because the gas should not alter the chemical composition of the material being deposited.
The inertness ensures that the sputtered material remains pure and maintains its desired properties.
2. High Sputtering Rate
Argon has a high sputtering rate compared to other gases.
This efficiency is due to its atomic properties, which allow for effective momentum transfer when ions collide with the target material.
The high sputtering rate means that more material can be deposited in a shorter time, increasing the process efficiency.
3. Low Price and Availability
Argon is relatively inexpensive and widely available, making it a cost-effective choice for industrial and research applications.
The affordability and accessibility of argon contribute to its popularity in sputtering processes.
4. Use in Plasma Formation
After establishing a vacuum in the chamber, argon is introduced to facilitate the formation of plasma.
A voltage applied across the target and the substrate ionizes the argon atoms, creating a plasma.
This plasma is essential for the sputtering process as it provides the charged particles (ions) that bombard the target material, causing it to eject atoms that then deposit onto the substrate.
5. Variability in Gas Selection
While argon is the most common choice, other inert gases like krypton and xenon are also used, particularly for sputtering heavier elements where their higher atomic weights are advantageous for momentum transfer.
Neon is preferred for sputtering lighter elements due to its lighter atomic weight.
Reactive gases such as oxygen and nitrogen can be used alongside inert gases like argon.
These reactive gases are used to deposit thin films of oxides, nitrides, and other compounds.
The use of a mixture of inert and reactive gases allows for the control of the stoichiometry and properties of the deposited film.
In summary, argon is the preferred inert gas in sputtering due to its inert nature, high sputtering rate, affordability, and availability.
Its use in plasma formation and compatibility with reactive gases makes it versatile for various sputtering applications.
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