Metals that can be sputter coated include gold, carbon, tungsten, iridium, chromium, platinum, palladium, silver, aluminum oxide, yttrium oxide, indium tin oxide (ITO), titanium oxide, tantalum nitride, and gadolinium. These materials are chosen for their specific properties such as conductivity, grain size, and compatibility with analytical techniques like EDX.
Gold is historically the most common material for sputter coating due to its high conductivity and small grain size, which is ideal for high-resolution imaging. It is particularly favored in applications where electrical conductivity and minimal interference with imaging are crucial.
Carbon is used when energy-dispersive X-ray (EDX) analysis is required because its X-ray peak does not conflict with the peaks of other elements, ensuring accurate analysis of the sample's elemental composition.
Tungsten, Iridium, and Chromium are newer materials used for sputter coating, especially when ultra-high-resolution imaging is needed. These metals have even finer grain sizes than gold, enhancing the resolution and clarity of the images obtained.
Platinum, Palladium, and Silver are also used, with silver having the advantage of reversibility, which can be particularly useful in certain experimental setups where the coating might need to be removed or altered without damaging the sample.
Aluminum Oxide, Yttrium Oxide, Indium Tin Oxide (ITO), Titanium Oxide, Tantalum Nitride, and Gadolinium are other materials used for sputter coating. These materials are chosen for their specific properties such as chemical resistance, electrical conductivity, and optical properties. For example, ITO is used for its transparency and conductivity, making it ideal for electronic displays.
In summary, the choice of metal for sputter coating depends on the specific requirements of the application, including the need for conductivity, resolution, compatibility with analytical techniques, and the physical or chemical properties of the coating material.
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