Argon is widely used in sputtering processes for several reasons.
4 Key Reasons Why Argon is the Preferred Gas for Sputtering Processes
1. High Sputtering Rate
Argon is a noble gas with a high atomic weight.
This makes it a great source of ions for bombarding the target material.
Positively charged argon ions are attracted to the negatively charged target at high velocity.
This results in a high rate of sputtering, leading to faster deposition rates.
2. Inert Nature
Argon is chemically inert.
This means it doesn't react with most materials.
The inertness of argon ensures that the sputtered particles are not contaminated or altered.
This preserves the desired properties of the thin film.
3. Low Price and Availability
Argon is relatively inexpensive compared to other noble gases like krypton and xenon.
It is widely available and can be obtained in high purity.
This makes it a practical choice for industrial applications where cost-effectiveness is important.
4. Other Considerations
Using argon in sputtering allows for the operation of the process in various orientations.
It also allows for coating complex shapes.
Since no melting of the source material is required, the process can be adapted to different configurations.
This enhances its versatility.
Additionally, argon can lead to denser layers with less scattering of material.
This improves the overall quality of the deposited films.
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