Sputtering gas is typically an inert gas, such as argon, that is used in the sputtering process.
Sputtering is a method of thin film deposition that uses gaseous plasma to dislodge atoms from the surface of a solid target material.
In this process, ions of the inert gas are accelerated into the target material, causing atoms to be ejected in the form of neutral particles.
These neutral particles then traverse and deposit as a thin film onto the surface of a substrate.
5 Key Points to Understand the Process
1. The Role of Inert Gas
The sputtering process involves placing a substrate and a target material into a vacuum chamber filled with an inert gas.
2. High Voltage Application
When a high voltage of electricity is applied, the positively charged ions of the gas are attracted to the negatively charged target material, causing collisions.
3. Atom Ejection
These collisions lead to the ejection of atoms from the target material, which then deposit onto the substrate, forming a thin film.
4. Vacuum Environment
Sputtering is conducted in a vacuum to maintain a sterile and contamination-free environment.
5. Versatility of Sputtering
It is a versatile form of physical vapor deposition that can be used to deposit coatings of conductive or insulating materials.
The sputtering technique can be further categorized into sub-types such as direct current (DC), radio frequency (RF), mid-frequency (MF), pulsed DC, and HiPIMS, each with its own applicability.
Overall, sputtering gas, such as argon, plays a crucial role in the sputtering process by facilitating the dislodgement of atoms from the target material and the deposition of a thin film onto the substrate.
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