The sputtering yield, also known as the physical sputtering rate, is a measure of the number of atoms lost from a surface per incident energetic particle striking the surface.
It is an important factor in sputter deposition processes as it affects the sputter deposition rate.
The sputtering yield primarily depends on three major factors: the target material, the mass of the bombarding particles, and the energy of the bombarding particles.
In the energy range where sputtering occurs (10 to 5000 eV), the sputtering yield increases with particle mass and energy.
The sputter yield is influenced by various factors, including the angle at which the ions strike the surface, the amount of ion energy during the collision, the weight of the ions, the weight of the atoms of the target material, the binding energy between the atoms of the target material, magnetic field strength and design factors (in magnetron cathodes), and plasma gas pressure.
In order to eject an atom from the target material, the ions must have a minimum energy, typically 30-50 eV, which is material-dependent.
Above this threshold, the sputtering yield increases.
However, the increase in yield flattens rapidly at high ion energies because the energy is deposited deeper into the target and barely reaches the surface.
The ratio of the masses of the ion and target atom determines the possible momentum transfer.
For light target atoms, the maximum yield is achieved when the mass of the target and ion approximately match.
However, as the mass of the target atoms increases, the maximum yield shifts to higher mass ratios between the ion and the target atom.
Sputtering yield has advantages in sputter deposition processes, such as high deposition rates and the ability to deposit a wide range of materials.
However, it also has disadvantages, including high capital expenses, relatively low deposition rates for some materials, degradation of organic solids by ionic bombardment, and a greater tendency to introduce impurities in the substrate compared to deposition by evaporation.
Overall, the sputtering yield is an important parameter to consider in sputter deposition processes as it determines the efficiency and effectiveness of the deposition process.
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