The lifespan of a sputter target can vary significantly depending on several factors. These include the material of the target, the power applied, the duty cycle, and the cooling efficiency. Generally, the target is designed to withstand a certain amount of energy before it needs to be replaced.
How long does a sputter target last? 4 Key Factors to Consider
1. Material and Power Application
The type of material used for the sputter target plays a crucial role in its longevity. For instance, molybdenum targets are used for producing conductive thin films and are subject to specific power settings.
The energy applied to the target is pulsed. This means bursts of high voltage energy (~100 µs, kW·cm-2) are followed by periods of lower or no power, known as the "off duty" time.
This pulsing allows the target to cool and reduces the average power to 1–10 kW, maintaining process stability.
2. Cooling Efficiency
Effective cooling is vital to extend the life of the sputter target. Traditional designs have multiple thermal interfaces between the target and the cooling system, which can impede heat transfer.
However, newer designs enable a direct connection to the cooling well, reducing the number of heat transfer interfaces to one. This can be enhanced by thermally conductive vacuum grease.
This direct cooling method allows for higher deposition rates and longer target life.
3. Energy Distribution
In the sputtering process, only about 1% of the incident ion energy is used to eject target material. The rest is distributed as follows: 75% heats the target and the remaining 24% is dissipated by secondary electrons.
This distribution of energy highlights the importance of efficient cooling to prevent the target from reaching critical temperatures that could degrade its performance or cause damage.
4. Size and Shape
The size and shape of the sputtering target can also affect its lifespan. Larger targets might require segmented designs to facilitate cooling and handling.
This could influence how long each segment lasts under operation.
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