Sputtering is a complex process that involves the energy distribution of sputtered atoms and their transport from the target to the substrate.
Sputtered atoms typically have energies ranging up to several tens of electron volts (eV).
This energy is equivalent to temperatures of 100,000 K.
These high-energy atoms travel ballistically from the target in straight lines.
They impact substrates or the vacuum chamber with significant energy.
This can lead to resputtering, where the impacted material is ejected again.
4 Key Factors Explained
1. Gas Pressure and Atom Energy
At higher gas pressures, sputtered atoms may collide with gas atoms.
These collisions act as moderators, causing the atoms to lose energy.
The atoms transition to a diffusive motion, involving a random walk.
Eventually, the atoms condense on the substrates or vacuum chamber walls.
The transition from ballistic to diffusive motion is influenced by the background gas pressure.
This allows a wide range of energy states to be accessed during the sputtering process.
2. Choice of Sputtering Gas
Inert gases like argon are commonly used due to their chemical stability.
For sputtering light elements, neon is sometimes used.
For heavier elements, krypton or xenon may be chosen to better match the target mass and enhance momentum transfer.
Reactive gases can be used when sputtering compounds.
This allows chemical reactions to occur on the target surface, in-flight, or on the substrate, depending on process parameters.
3. Controllable Parameters
The complexity of sputter deposition involves many controllable parameters.
This provides a high degree of control over the growth and microstructure of the deposited film.
Sputtering is a versatile and precise method for depositing thin films from a wide variety of materials.
It can be used on diverse substrate shapes and sizes.
4. Energy Spectrum and Control
The range of sputtering encompasses a spectrum from high-energy ballistic impacts to low-energy thermalized motion.
This range is controlled by factors such as gas pressure, choice of sputtering gas, and process parameters.
It allows for precise control over the deposition process.
Sputtering is a valuable tool in materials science and technology.
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