A diffusion pump is a type of vacuum pump that operates without moving parts, differentiating it from mechanical pumps which use pistons or fins to displace air. Instead, diffusion pumps employ a fluid entrainment mechanism, utilizing the vapor of a boiling fluid (often referred to as "oil") to capture and transport air molecules. The vapor, which has high kinetic energy, captures the air molecules and carries them to a cooler area where they are released. This process is aided by gravity and the downward flow of the vapor, which directs the air molecules towards the bottom of the pump.
The operational simplicity and durability of diffusion pumps make them suitable for various industrial applications, including electron-beam microscopy, vacuum deposition, and vacuum furnaces. They are capable of achieving high vacuum levels ranging from 10^-2 to 10^-10 torr. However, diffusion pumps cannot operate independently; they require a backing pump to maintain a low pressure within the system, especially during idle periods. This setup ensures that the diffusion pump can effectively function when needed, isolating the holding pump valve and relying on the mechanical pump and blower as the backing pump.
In terms of maintenance, diffusion pumps are relatively straightforward, requiring only the monitoring of oil levels and the functionality of the heaters. The heating system typically involves a tubular element, a crush plate, and a clamping plate, with proper alignment being crucial for efficient operation.
Diffusion pumps contrast with kinetic pumps, such as turbomolecular pumps, which use impellers or high-speed rotating blades to transfer momentum to gas molecules, pushing them towards the outlet. These kinetic pumps are used for high-pressure applications and have different operational and maintenance requirements compared to diffusion pumps.
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