The purpose of a diffusion pump is to achieve and maintain high vacuum levels in various industrial applications.
This is done by using the vapor of a boiling fluid to capture and remove air molecules from a chamber.
This method is particularly useful when mechanical pumps alone cannot achieve the desired low pressure levels.
4 Key Points Explained
1. Operation Principle
Unlike mechanical pumps that use pistons, fins, or lobes to physically push air out of a chamber, diffusion pumps operate on the principle of fluid entrainment.
They use the vapor of a boiling fluid (often referred to as oil) to capture air molecules.
The vaporized fluid, being denser than the gas in the chamber, effectively sweeps the gas molecules towards the exhaust where they are condensed and collected.
This process is aided by the downward flow of the vapor, influenced by gravity, which directs the gas molecules towards the bottom of the pump.
2. Role in Vacuum Systems
In vacuum systems, diffusion pumps are typically used as the secondary or tertiary stage after mechanical pumps and sometimes booster pumps.
Mechanical pumps are effective up to a certain pressure (around 20 torr), after which their efficiency declines.
The diffusion pump is activated when the pressure reaches between 10 and 1 micron, allowing the system to achieve high vacuum levels, often down to 10^-10 torr.
3. Integration with Other Pumps
Diffusion pumps do not operate independently; they require a holding pump to maintain pressure in the fore-line and prevent oil from the diffusion pump from escaping into the vessel.
During operation, the holding pump is isolated, and the mechanical pump serves as the backing pump for the diffusion pump, ensuring that the system maintains the necessary vacuum levels.
4. Applications
Diffusion pumps are essential in applications requiring very low pressures, such as electron-beam microscopy, vacuum deposition, coatings, and vacuum furnaces.
Their ability to achieve and maintain high vacuum levels without moving parts makes them a preferred choice in these industries.
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