When it comes to achieving high vacuum, a combination of pumps is usually necessary.
The primary choice for high vacuum levels is often a turbomolecular pump or an oil diffusion pump.
These pumps are designed to achieve very low pressures and are typically used in conjunction with a pre-pump.
A pre-pump, such as a rotary vane pump or a dry scroll pump, helps to create the initial vacuum conditions needed for the high vacuum pump to function effectively.
5 Essential Facts You Need to Know
1. Turbomolecular Pumps
Turbomolecular pumps are specifically designed to operate at very high vacuum levels, typically below 10^-7 mbar.
They work by using rotating blades to impart momentum to gas molecules in a direction opposite to the direction of gas flow.
This effectively pumps the gas out of the system, making these pumps highly efficient at removing gases.
Turbomolecular pumps are commonly used in applications requiring ultra-high vacuum, such as semiconductor manufacturing, scientific research, and space simulation chambers.
2. Oil Diffusion Pumps
Oil diffusion pumps are another type of pump used for high vacuum applications.
They operate by directing a high-speed jet of oil vapor against the walls of a chamber.
The oil vapor then condenses and returns to the boiler, while the gas molecules in the chamber are propelled towards an outlet where they are collected and removed.
These pumps can achieve vacuum levels down to 10^-7 mbar and are often used in scientific and industrial applications where high vacuum is required.
3. Backing Pumps
Both turbomolecular and oil diffusion pumps require a backing pump to function effectively.
A backing pump, such as a rotary vane pump, creates a rough vacuum at the inlet of the high vacuum pump.
This rough vacuum is then further refined by the high vacuum pump to achieve the desired ultra-low pressures.
4. Combination of Pumps
For high vacuum applications, the use of a turbomolecular pump or an oil diffusion pump in combination with a backing pump is essential.
This setup is crucial in various scientific and industrial processes where high vacuum conditions are required.
5. Applications
High vacuum setups are vital in many fields, including semiconductor manufacturing, scientific research, and space simulation chambers.
These setups ensure precision and reliability for the most demanding applications.
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