To achieve a high vacuum, a combination of pumps is typically used, with a turbomolecular pump or an oil diffusion pump being the primary choice for high vacuum levels. These pumps are specialized for achieving very low pressures and are often used in series with a pre-pump, such as a rotary vane pump or a dry scroll pump.
Turbomolecular Pumps: Turbomolecular pumps are designed to operate at very high vacuum levels, typically below 10^-7 mbar. They work by using rotating blades to impart momentum to gas molecules in a direction opposite to the direction of gas flow, effectively pumping the gas out of the system. These pumps are highly efficient at removing gases and are commonly used in applications requiring ultra-high vacuum, such as in semiconductor manufacturing, scientific research, and space simulation chambers.
Oil Diffusion Pumps: Oil diffusion pumps are another type of pump used for high vacuum applications. They operate by directing a high-speed jet of oil vapor against the walls of a chamber, which then condenses and returns to the boiler. The gas molecules in the chamber are propelled by the oil vapor jets towards an outlet where they are collected and removed. These pumps can achieve vacuum levels down to 10^-7 mbar and are often used in scientific and industrial applications where high vacuum is required.
Both turbomolecular and oil diffusion pumps require a backing pump (such as a rotary vane pump) to maintain a low enough pressure at their inlet to function effectively. The backing pump creates a rough vacuum, which is then further refined by the high vacuum pump to achieve the desired ultra-low pressures.
In summary, for high vacuum applications, the use of a turbomolecular pump or an oil diffusion pump in combination with a backing pump (like a rotary vane pump) is essential to achieve the necessary vacuum levels. These setups are crucial in various scientific and industrial processes where high vacuum conditions are required.
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