Knowledge What is Physical Sputtering? 5 Key Points to Understand This Thin Film Deposition Technique
Author avatar

Tech Team · Kintek Solution

Updated 2 months ago

What is Physical Sputtering? 5 Key Points to Understand This Thin Film Deposition Technique

Physical sputtering is a process used in thin film deposition.

In this process, atoms are ejected from a solid target material due to bombardment by energetic ions.

This technique is widely utilized in various industries, including semiconductor processing, precision optics, and surface finishing.

The reason for its popularity is the excellent uniformity, density, and adhesion of the sputtered thin films.

5 Key Points to Understand Physical Sputtering

What is Physical Sputtering? 5 Key Points to Understand This Thin Film Deposition Technique

1. Mechanism of Sputtering

Sputtering is a type of physical vapor deposition (PVD).

A target material is bombarded with high-energy particles, typically ions of a noble gas like argon.

This bombardment causes atoms from the target material to be ejected and subsequently deposited onto a substrate, forming a thin film.

The process is initiated by introducing an inert gas like argon into a vacuum chamber and electrically energizing a cathode to create a plasma.

The target material acts as the cathode, and the substrate where the film is to be deposited is usually attached to the anode.

2. Types of Sputtering

There are several variations of sputtering, including cathodic sputtering, diode sputtering, RF or DC sputtering, ion-beam sputtering, and reactive sputtering.

Despite these different names, the fundamental process remains the same: the ejection of atoms from a target material due to ion bombardment.

3. Process Setup

In a typical setup, the target material and the substrate are placed in a vacuum chamber.

A voltage is applied between them, setting the target as the cathode and the substrate as the anode.

The application of voltage creates a plasma that bombards the target with ions, causing sputtering.

4. Applications and Advantages

Sputtering is favored for its ability to produce high-quality thin films with precise control over thickness and composition.

It is used in the manufacturing of semiconductors, solar panels, disk drives, and optical devices.

The process is versatile and can be used to deposit a wide range of materials, including metals, alloys, and compounds.

5. Sputter Yield

The efficiency of the sputtering process is quantified by the sputter yield.

The sputter yield is the number of atoms ejected from the target per incident ion.

Factors influencing the sputter yield include the energy and mass of the incident ions, the mass of the target atoms, and the bond energy of the solid.

6. Surface Physics Applications

In addition to thin film deposition, sputtering is also used in surface physics for cleaning high-purity surfaces and analyzing the chemical composition of surfaces.

This is achieved by observing the materials ejected from the surface during sputtering.

In summary, physical sputtering is a versatile and effective method for depositing thin films, offering high precision and quality, which is crucial in numerous high-tech industries.

Continue Exploring, Consult Our Experts

Unlock the potential of precision thin film deposition with KINTEK's advanced physical sputtering solutions.

Our cutting-edge technology ensures exceptional uniformity, density, and adhesion, making it ideal for semiconductor processing, precision optics, and surface finishing.

Experience the KINTEK difference in quality and performance.

Contact us today to elevate your thin film applications to new heights!

Related Products

Spark plasma sintering furnace SPS furnace

Spark plasma sintering furnace SPS furnace

Discover the benefits of Spark Plasma Sintering Furnaces for rapid, low-temperature material preparation. Uniform heating, low cost & eco-friendly.

Plasma enhanced evaporation deposition PECVD coating machine

Plasma enhanced evaporation deposition PECVD coating machine

Upgrade your coating process with PECVD coating equipment. Ideal for LED, power semiconductors, MEMS and more. Deposits high-quality solid films at low temps.

High Purity Platinum (Pt) Sputtering Target / Powder / Wire / Block / Granule

High Purity Platinum (Pt) Sputtering Target / Powder / Wire / Block / Granule

High purity Platinum (Pt) sputtering targets, powders, wires, blocks, and granules at affordable prices. Tailored to your specific needs with diverse sizes and shapes available for various applications.

High Purity Aluminum (Al) Sputtering Target / Powder / Wire / Block / Granule

High Purity Aluminum (Al) Sputtering Target / Powder / Wire / Block / Granule

Get high-quality Aluminum (Al) materials for laboratory use at affordable prices. We offer customized solutions including sputtering targets, powders, foils, ingots & more to meet your unique needs. Order now!

High Purity Iron (Fe) Sputtering Target / Powder / Wire / Block / Granule

High Purity Iron (Fe) Sputtering Target / Powder / Wire / Block / Granule

Looking for affordable Iron (Fe) materials for laboratory use? Our range of products includes sputtering targets, coating materials, powders, and more in various specifications and sizes, tailored to meet your specific needs. Contact us today!

High Purity Selenium (Se) Sputtering Target / Powder / Wire / Block / Granule

High Purity Selenium (Se) Sputtering Target / Powder / Wire / Block / Granule

Looking for affordable Selenium (Se) materials for laboratory use? We specialize in producing and tailoring materials of various purities, shapes, and sizes to suit your unique requirements. Explore our range of sputtering targets, coating materials, powders, and more.

Zinc Sulfide (ZnS) Sputtering Target / Powder / Wire / Block / Granule

Zinc Sulfide (ZnS) Sputtering Target / Powder / Wire / Block / Granule

Get affordable Zinc Sulfide (ZnS) materials for your laboratory needs. We produce and customize ZnS materials of varying purities, shapes, and sizes. Choose from a wide range of sputtering targets, coating materials, powders, and more.

Tin Sulfide (SnS2) Sputtering Target / Powder / Wire / Block / Granule

Tin Sulfide (SnS2) Sputtering Target / Powder / Wire / Block / Granule

Find high-quality Tin Sulfide (SnS2) materials for your laboratory at affordable prices. Our experts produce and customize materials to meet your specific needs. Check out our range of sputtering targets, coating materials, powders, and more.

RF PECVD System Radio Frequency Plasma-Enhanced Chemical Vapor Deposition

RF PECVD System Radio Frequency Plasma-Enhanced Chemical Vapor Deposition

RF-PECVD is an acronym for "Radio Frequency Plasma-Enhanced Chemical Vapor Deposition." It deposits DLC (Diamond-like carbon film) on germanium and silicon substrates. It is utilized in the 3-12um infrared wavelength range.

High Purity Iridium (Ir) Sputtering Target / Powder / Wire / Block / Granule

High Purity Iridium (Ir) Sputtering Target / Powder / Wire / Block / Granule

Looking for high-quality Iridium (Ir) materials for laboratory use? Look no further! Our expertly produced and tailored materials come in various purities, shapes, and sizes to suit your unique needs. Check out our range of sputtering targets, coatings, powders, and more. Get a quote today!

High Purity Boron (B) Sputtering Target / Powder / Wire / Block / Granule

High Purity Boron (B) Sputtering Target / Powder / Wire / Block / Granule

Get affordable Boron (B) materials tailored to your specific lab needs. Our products range from sputtering targets to 3D printing powders, cylinders, particles, and more. Contact us today.

Electron Gun Beam Crucible

Electron Gun Beam Crucible

In the context of electron gun beam evaporation, a crucible is a container or source holder used to contain and evaporate the material to be deposited onto a substrate.

Electron Beam Evaporation Graphite Crucible

Electron Beam Evaporation Graphite Crucible

A technology mainly used in the field of power electronics. It is a graphite film made of carbon source material by material deposition using electron beam technology.


Leave Your Message