CVD & PECVD Furnace
Plasma enhanced evaporation deposition PECVD coating machine
Item Number : KT-PED
Price varies based on specs and customizations
- Sample holder heating temperature
- ≤800℃
- Gas purge channels
- 4 channels
- Vacuum chamber chamber size
- Φ500mm × 550 mm
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Introduction
Plasma Enhanced Chemical Vapor Deposition (PECVD) is a vacuum thin film deposition process that uses vapors or gases as precursors to create a coating. PECVD is a variation of chemical vapor deposition (CVD) that uses plasma instead of heat to activate the source gas or vapor. Since high temperatures can be avoided, the range of possible substrates expands to low melting point materials – even plastics in some cases. Moreover, the range of coating materials that can be deposited also grows. PECVD is used to deposit a wide variety of materials, including dielectrics, semiconductors, metals, and insulators. PECVD coatings are used in a wide variety of applications, including solar cells, flat panel displays, and microelectronics.
Applications
Plasma Enhanced Chemical Vapor Deposition (PECVD) coating machines offer a versatile solution for various industries and applications:
- LED Lighting:** Deposition of high-quality dielectric and semiconductor films for light-emitting diodes (LEDs).
- Power Semiconductors:** Formation of insulating layers, gate oxides, and other critical components in power semiconductor devices.
- MEMS:** Fabrication of thin films for microelectromechanical systems (MEMS), such as sensors and actuators.
- Optical Coatings:** Deposition of anti-reflection coatings, optical filters, and other optical components.
- Thin Film Solar Cells:** Production of amorphous and microcrystalline silicon thin films for solar cell devices.
- Surface Modification:** Enhancement of surface properties, such as corrosion resistance, wear resistance, and biocompatibility.
- Nanotechnology:** Synthesis of nanomaterials, including nanoparticles, nanowires, and thin films.
Features
The Plasma Enhanced Chemical Vapor Deposition (PECVD) Coating Machine offers numerous advantages that enhance productivity and deliver exceptional results:
- Low-temperature deposition: Enables the formation of high-quality films at temperatures significantly lower than traditional CVD methods, making it suitable for delicate substrates.
- High deposition rates: Maximizes efficiency by depositing films rapidly, reducing production time and increasing output.
- Uniform and crack-resistant films: Ensures consistent film properties and minimizes the risk of cracking, leading to reliable and durable coatings.
- Excellent adhesion to substrates: Provides strong bonding between the film and the substrate, ensuring long-lasting performance and preventing delamination.
- Versatile coating capabilities: Allows for the deposition of a wide range of materials, including SiO2, SiNx, and SiOxNy, to meet diverse application requirements.
- Customization for complex geometries: Accommodates substrates with intricate shapes, ensuring uniform coating and optimal performance.
- Low maintenance and easy installation: Minimizes downtime and simplifies setup, enhancing productivity and cost-effectiveness.
Technical specifications
| Sample holder | Size | 1-6 inches |
| Rotate speed | 0-20rpm adjustable | |
| Heating temperature | ≤800℃ | |
| Control accuracy | ±0.5℃ SHIMADEN PID Controller | |
| Gas purge | Flow meter | MASS FLOWMETER CONTROLLER (MFC) |
| Channels | 4 channels | |
| Cooling method | Circulating water cooling | |
| Vacuum chamber | Chamber size | Φ500mm X 550mm |
| Observation port | Full view port with baffle | |
| Chamber material | 316 Stainless steel | |
| Door type | Front open type door | |
| Cap material | 304 Stainless steel | |
| Vacuum pump port | CF200 flange | |
| Gas inlet port | φ6 VCR connector | |
| Plasma power | Source power | DC power or RF power |
| Coupling mode | Inductively coupled or plate capacitive | |
| Output power | 500W—1000W | |
| Bias power | 500v | |
| Vacuum pump | Pre- pump | 15L/S Vane vacuum pump |
| Turbo pump port | CF150/CF200 620L/S-1600L/S | |
| Relief port | KF25 | |
| Pump speed | Vane pump:15L/s，Turbo pump:1200l/s或1600l/s | |
| Vacuum degree | ≤5×10-5Pa | |
| Vacuum sensor | Ionization/resistance vacuum gauge/film gauge | |
| System | Electric power supply | AC 220V /380 50Hz |
| Rated power | 5kW | |
| Dimensions | 900mm X 820mm X870mm | |
| Weight | 200kg |
Principle
Plasma Enhanced Chemical Vapor Deposition (PECVD) utilizes plasma to stimulate chemical reactions during deposition, enabling high-quality solid films to be formed at low temperatures. By employing high-energy plasma, PECVD machines enhance reaction rates and lower reaction temperatures. This technique is widely used in LED lighting, power semiconductors, and MEMS. It allows for the deposition of SiO2, SiNx, SiOxNy, and other media films, as well as high-speed deposition of SiO thick films on composite substrates. PECVD offers excellent film-forming quality, minimizes pinholes, and reduces cracking, making it suitable for producing amorphous and microcrystalline silicon thin film solar cell devices.
Advantage
- Ability to deposit various materials: PECVD can deposit a wide range of materials, including diamond-like carbon, silicon compounds, and metal oxides, allowing for the creation of films with tailored properties.
- Low-temperature operation: PECVD operates at low temperatures (typically 300-450°C), making it suitable for heat-sensitive substrates.
- High-quality thin films: PECVD produces thin films with exceptional uniformity, thickness control, and resistance to cracking.
- Excellent adhesion: The films deposited by PECVD exhibit strong adhesion to the substrate, ensuring durability and reliability.
- Conformal coating: PECVD enables the coating of complex geometries, providing uniform coverage and protection.
- High deposition rates: PECVD offers fast deposition rates, increasing productivity and reducing production time.
- Low maintenance: PECVD systems are designed for low maintenance, minimizing downtime and maximizing uptime.
- Easy installation: PECVD equipment is relatively easy to install and integrate into existing production lines.
- Rigid design: PECVD systems are built with robust designs, ensuring stability and long-lasting performance.
- Extended working life: PECVD systems are designed for longevity, providing a cost-effective solution for long-term thin film deposition needs.
Warnings
Operator safety is the top important issue! Please operate the equipment with cautions. Working with inflammable& explosive or toxic gases is very dangerous, operators must take all necessary precautions before starting the equipment. Working with positive pressure inside the reactors or chambers is dangerous, operator must fellow the safety procedures strictly. Extra caution must also be taken when operating with air-reactive materials, especially under vacuum. A leak can draw air into the apparatus and cause a violent reaction to occur.
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FAQ
What Is Physical Vapor Deposition (PVD)?
What Is CVD Furnace?
Chemical vapor deposition (CVD) is a technology that uses various energy sources such as heating, plasma excitation or light radiation to chemically react gaseous or vapor chemical substances on the gas phase or gas-solid interface to form solid deposits in the reactor by means of chemical reaction.To put it simply, two or more gaseous raw materials are introduced into a reaction chamber, and then they react with each other to form a new material and deposit it on the substrate surface.
CVD furnace is one combined furnace system with high temperature tube furnace unit,gases control unit, and vacuum unit, it is widely used for experiment and production of composite material preparation, microelectronics process, semiconductor optoelectronic, solar energy utilization, optical fiber communication, superconductor technology, protective coating field.
What Are Thermal Evaporation Sources?
What Is PECVD Method?
What Are The Methods Used To Deposit Thin Films?
How Does PACVD Work?
What Is RF PECVD?
What Is Magnetron Sputtering?
How Does CVD Furnace Work?
CVD furnace system consists of high temperature tube furnace unit, reacting gas source precise control unit, vacuum pump station and corresponding assembling parts.
Vacuum pump is to remove the air from the reacting tube,and make sure there is no unwanted gases inside the reaction tube, after that the tube furnace will heat the reaction tube to a target temperature, then reacting gas source precise control unit can introduce different gases with a set ratio into the furnace tube for the chemical reaction, the chemical vapor deposition will be formed in the CVD furnace.
What Is Mpcvd?
What Are The Main Types Of Thermal Evaporation Sources?
What Is The Basic Principle Of CVD?
What Is Sputtering Target?
What Is PECVD Used For?
What Is Thin Film Deposition Equipment?
PACVD Is PECVD?
How Does RF PECVD Work?
Why Magnetron Sputtering?
Which Gas Is Used In CVD Process?
There are tremendous gas sources can be used in the CVD process, the common chemical reactions of CVD includes Pyrolysis, photolysis, reduction, oxidation, redox,so the gases involved in these chemical reactions can be used in the CVD process.
We take CVD Graphene growth for an example, the gases used in the CVD process will be CH4,H2,O2 and N2.
What Is Mpcvd Machine?
How Do Thermal Evaporation Sources Work?
What Are The Different Types Of CVD Method?
How Are Sputtering Targets Made?
What Are The Advantages Of PECVD?
What Is Thin-film Deposition Technology?
What Are The Advantages Of Using PACVD?
What Are The Advantages Of RF PECVD?
What Are The Materials Used In Thin Film Deposition?
Thin film deposition commonly utilizes metals, oxides, and compounds as materials, each with its unique advantages and disadvantages. Metals are preferred for their durability and ease of deposition but are relatively expensive. Oxides are highly durable, can withstand high temperatures, and can be deposited at low temperatures, but can be brittle and challenging to work with. Compounds offer strength and durability, can be deposited at low temperatures and tailored to exhibit specific properties.
The selection of material for a thin film coating is dependent on the application requirements. Metals are ideal for thermal and electrical conduction, while oxides are effective in offering protection. Compounds can be tailored to suit specific needs. Ultimately, the best material for a particular project will depend on the specific needs of the application.
What Is The Advantage Of CVD System?
- Wide range of films can be produced, metal film, nonmetal film and multi-component alloy film as required. At the same time, it can prepare high-quality crystals that are difficult to obtain by other methods, such as GaN, BP, etc.
- The film forming speed is fast, usually several microns per minute or even hundreds of microns per minute. It is possible to simultaneously deposit large quantities of coatings with uniform composition, which is incomparable to other film preparation methods, such as liquid phase epitaxy (LPE) and molecular beam epitaxy (MBE).
- The working conditions are carried out under normal pressure or low vacuum conditions, so the coating has good diffraction, and the workpieces with complex shapes can be uniformly coated, which is much superior to PVD.
- Due to the mutual diffusion of reaction gas, reaction product and substrate, a coating with good adhesion strength can be obtained, which is crucial for preparing surface strengthened films such as wear-resistant and anti-corrosion films.
- Some films grow at a temperature far lower than the melting point of the film material. Under the condition of low temperature growth, the reaction gas and reactor wall and impurities contained in them almost do not react, so a film with high purity and good crystallinity can be obtained.
- Chemical vapor deposition can obtain a smooth deposition surface. This is because compared with LPE, chemical vapor deposition (CVD) is carried out under high saturation, with high nucleation rate, high nucleation density, and uniform distribution on the whole plane, resulting in a macroscopic smooth surface. At the same time, in chemical vapor deposition, the average free path of molecules (atoms) is much larger than LPE, so the spatial distribution of molecules is more uniform, which is conducive to the formation of a smooth deposition surface.
- Low radiation damage, which is a necessary condition for manufacturing metal oxide semiconductors (MOS) and other devices
What Are The Advantages Of Mpcvd?
What Are The Advantages Of Using Thermal Evaporation Sources?
What Are The Advantages Of Using Chemical Vapor Deposition Machines?
What Is Sputtering Target Used For?
What Is The Difference Between ALD And PECVD?
What Are The Advantages Of Using Thin Film Deposition Equipment?
What Are The Common Applications Of PACVD?
What Are The Methods To Achieve Optimal Thin Film Deposition?
To achieve thin films with desirable properties, high-quality sputtering targets and evaporation materials are essential. The quality of these materials can be influenced by various factors, such as purity, grain size, and surface condition.
The purity of sputtering targets or evaporation materials plays a crucial role, as impurities can cause defects in the resulting thin film. Grain size also affects the quality of the thin film, with larger grains leading to poor film properties. Additionally, the surface condition is crucial, since rough surfaces can result in defects in the film.
To attain the highest quality sputtering targets and evaporation materials, it is crucial to select materials that possess high purity, small grain size, and smooth surfaces.
Uses Of Thin Film Deposition
Zinc Oxide-Based Thin Films
ZnO thin films find applications in several industries such as thermal, optical, magnetic, and electrical, but their primary use is in coatings and semiconductor devices.
Thin-Film Resistors
Thin-film resistors are crucial for modern technology and are used in radio receivers, circuit boards, computers, radiofrequency devices, monitors, wireless routers, Bluetooth modules, and cell phone receivers.
Magnetic Thin Films
Magnetic thin films are used in electronics, data storage, radio-frequency identification, microwave devices, displays, circuit boards, and optoelectronics as key components.
Optical Thin Films
Optical coatings and optoelectronics are standard applications of optical thin films. Molecular beam epitaxy can produce optoelectronic thin-film devices (semiconductors), where epitaxial films are deposited one atom at a time onto the substrate.
Polymer Thin Films
Polymer thin films are used in memory chips, solar cells, and electronic devices. Chemical deposition techniques (CVD) offer precise control of polymer film coatings, including conformance and coating thickness.
Thin-Film Batteries
Thin-film batteries power electronic devices such as implantable medical devices, and the lithium-ion battery has advanced significantly thanks to the use of thin films.
Thin-Film Coatings
Thin-film coatings enhance the chemical and mechanical characteristics of target materials in various industries and technological fields. Anti-reflective coatings, anti-ultraviolet or anti-infrared coatings, anti-scratch coatings, and lens polarization are some common examples.
Thin-Film Solar Cells
Thin-film solar cells are essential to the solar energy industry, enabling the production of relatively cheap and clean electricity. Photovoltaic systems and thermal energy are the two main applicable technologies.
What Does PECVD Stand For?
PECVD is a technology that uses plasma to activate reaction gas, promote chemical reaction on the surface of substrate or near surface space, and generate solid film. The basic principle of plasma chemical vapor deposition technology is that under the action of RF or DC electric field, the source gas is ionized to form a plasma, the low-temperature plasma is used as the energy source, an appropriate amount of reaction gas is introduced, and the plasma discharge is used to activate the reaction gas and realize chemical vapor deposition.
According to the method of generating plasma, it can be divided into RF plasma, DC plasma and microwave plasma CVD, etc...
Are CVD Diamonds Real Or Fake?
What Applications Are Thermal Evaporation Sources Used For?
What Are The Applications Of Chemical Vapor Deposition Machines?
What Are Sputtering Targets For Electronics?
What Is The Difference Between PECVD And Sputtering?
What Factors Should Be Considered When Selecting Thin Film Deposition Equipment?
What Factors Should Be Considered When Selecting A PACVD System?
Factors And Parameters That Influence Deposition Of Thin Films
Deposition Rate:
The rate at which the film is produced, typically measured in thickness divided by time, is crucial for selecting a technology suitable for the application. Moderate deposition rates are sufficient for thin films, while quick deposition rates are necessary for thick films. It is important to strike a balance between speed and precise film thickness control.
Uniformity:
The consistency of the film across the substrate is known as uniformity, which usually refers to film thickness but can also relate to other properties such as the index of refraction. It is important to have a good understanding of the application to avoid under- or over-specifying uniformity.
Fill Capability:
Fill capability or step coverage refers to how well the deposition process covers the substrate's topography. The deposition method used (e.g., CVD, PVD, IBD, or ALD) has a significant impact on step coverage and fill.
Film Characteristics:
The characteristics of the film depend on the application's requirements, which can be categorized as photonic, optical, electronic, mechanical, or chemical. Most films must meet requirements in more than one category.
Process Temperature:
Film characteristics are significantly affected by process temperature, which may be limited by the application.
Damage:
Each deposition technology has the potential to damage the material being deposited upon, with smaller features being more susceptible to process damage. Pollution, UV radiation, and ion bombardment are among the potential sources of damage. It is crucial to understand the limitations of the materials and tools.
What Is The Difference Between CVD And PECVD?
The difference between PECVD and traditional CVD technology is that the plasma contains a large number of high-energy electrons, which can provide the activation energy required in the chemical vapor deposition process, thus changing the energy supply mode of the reaction system. Since the electron temperature in the plasma is as high as 10000K, the collision between electrons and gas molecules can promote the chemical bond breaking and recombination of the reaction gas molecules to generate more active chemical groups, while the whole reaction system maintains a lower temperature.
So compared to the CVD process, PECVD can carry out the same chemical vapor deposition process with a lower temperature.
What Factors Should Be Considered When Selecting A Chemical Vapor Deposition Machine?
What Is The Lifetime Of A Sputtering Target?
What Safety Considerations Are Associated With Operating Thin Film Deposition Equipment?
Can Chemical Vapor Deposition Machines Be Used For Multi-layered Thin Film Deposition?
4.9
out of
5
I'm impressed by how quickly my PECVD coating machine arrived. It was delivered within a week of ordering, which was much faster than I expected.
4.7
out of
5
The PECVD coating machine is an excellent value for the price. It's well-made and produces high-quality coatings.
4.8
out of
5
I've been using the PECVD coating machine for a few months now, and I'm very happy with its performance. The coatings are durable and have improved the performance of my products.
4.9
out of
5
The PECVD coating machine is a game-changer for my business. It's helped me to increase my production capacity and improve the quality of my products.
4.7
out of
5
I'm very impressed with the technological advancements of the PECVD coating machine. It's a cutting-edge piece of equipment that has helped me to stay ahead of the competition.
4.8
out of
5
The PECVD coating machine is easy to use and maintain. I've had no problems with it since I purchased it.
4.9
out of
5
I highly recommend the PECVD coating machine to anyone who needs a high-quality, durable coating for their products.
4.7
out of
5
The PECVD coating machine is a great investment for any business. It's helped me to save money and improve the quality of my products.
4.8
out of
5
I'm very satisfied with the PECVD coating machine. It's a reliable and efficient piece of equipment that has helped me to improve my production process.
4.9
out of
5
The PECVD coating machine is a must-have for any business that wants to improve the quality of its products. It's a versatile and easy-to-use machine that can be used for a variety of applications.
4.7
out of
5
I'm very happy with the PECVD coating machine. It's a well-made and durable machine that has helped me to improve the performance of my products.
4.8
out of
5
The PECVD coating machine is a great value for the price. It's a high-quality machine that has helped me to improve the efficiency of my production process.
4.9
out of
5
I'm very impressed with the PECVD coating machine. It's a versatile and easy-to-use machine that has helped me to improve the quality of my products.
4.7
out of
5
The PECVD coating machine is a great investment for any business. It's a reliable and efficient machine that has helped me to save money and improve the quality of my products.
4.8
out of
5
I'm very happy with the PECVD coating machine. It's a well-made and durable machine that has helped me to improve the performance of my products.
4.9
out of
5
The PECVD coating machine is a must-have for any business that wants to improve the quality of its products. It's a versatile and easy-to-use machine that can be used for a variety of applications.
4.7
out of
5
I'm very happy with the PECVD coating machine. It's a well-made and durable machine that has helped me to improve the performance of my products.
4.8
out of
5
The PECVD coating machine is a great investment for any business. It's a reliable and efficient machine that has helped me to save money and improve the quality of my products.
4.9
out of
5
I'm very impressed with the PECVD coating machine. It's a versatile and easy-to-use machine that has helped me to improve the quality of my products.
PDF - Plasma enhanced evaporation deposition PECVD coating machine
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DownloadCatalog of Thin Film Deposition Materials
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