The disadvantages of the sputtering process can be summarized as follows:
1) Low deposition rates: Compared to other deposition methods like thermal evaporation, sputtering rates are generally low. This means that it takes longer to deposit a desired thickness of film.
2) Non-uniform deposition: In many configurations, the distribution of the deposition flux is non-uniform. This requires moving fixturing or other methods to obtain films of uniform thickness.
3) Expensive targets: Sputtering targets can be costly, and the material usage may not be efficient. This adds to the overall cost of the process.
4) Heat generation: Most of the energy incident on the target during sputtering becomes heat, which needs to be removed. This can be challenging and may require additional cooling systems.
5) Contamination problems: The diffuse transport characteristic of sputtering makes it difficult to fully restrict where the atoms go. This can lead to contamination problems in the deposited film.
6) Difficulty in active control: Compared to other deposition techniques like pulsed laser deposition, controlling layer-by-layer growth in sputtering is more challenging. Additionally, inert sputtering gases can be built into the growing film as impurities.
7) Gas composition control: In reactive sputter deposition, the gas composition needs to be carefully controlled to prevent poisoning the sputtering target.
8) Material limitations: The selection of materials for sputtering coatings may be limited due to their melting temperature and susceptibility to degradation by ionic bombardment.
9) High capital expenses: Sputtering requires high capital expenses for equipment and setup, which can be a significant investment.
10) Limited deposition rates for some materials: The rates of deposition for certain materials, such as SiO2, can be relatively low in sputtering.
11) Impurity introduction: Sputtering has a greater tendency to introduce impurities into the substrate compared to deposition by evaporation, as it operates under a lesser vacuum range.
Overall, while sputtering offers advantages such as control over film thickness and composition, as well as the ability to sputter-clean the substrate, it also has several disadvantages that need to be considered in the deposition process.
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