Knowledge What is a Cathode Sputtering? 5 Key Points to Understand the Process
Author avatar

Tech Team · Kintek Solution

Updated 2 months ago

What is a Cathode Sputtering? 5 Key Points to Understand the Process

Cathode sputtering is a process used in thin film deposition.

In this process, a solid target is bombarded by high-energy ions.

This is achieved by creating a glow discharge between two electrodes within a rarefied atmosphere under vacuum conditions.

The two electrodes are the target (cathode) and the substrate (anode).

A DC field is applied to create a discharge between the electrodes.

By introducing an inert gas, usually argon, a plasma is formed through the ionization of the gas.

The positively charged argon ions are then accelerated towards the negatively charged target (cathode), resulting in the sputtering of cathode material.

The sputtered material, in the form of atoms or molecules, is then deposited onto the substrate, forming a thin film or coating.

The thickness of the deposited material typically ranges from 0.00005 to 0.01 mm.

Common materials used as target deposits include chromium, titanium, aluminum, copper, molybdenum, tungsten, gold, and silver.

Sputtering is an etching process that alters the physical properties of a surface.

It can be used for various applications, including coating substrates for electrical conductivity, reducing thermal damage, enhancing secondary electron emission, and providing thin films for scanning electron microscopy.

The sputtering technique involves introducing a controlled gas, usually argon, into a vacuum chamber.

The cathode, or target, is electrically energized to generate a self-sustaining plasma.

The gas atoms within the plasma become positively charged ions by losing electrons and are then accelerated towards the target.

The impact dislocates atoms or molecules from the target material, creating a vapor stream.

This sputtered material passes through the chamber and deposits onto the substrate as a film or coating.

In a sputtering system, the cathode is the target of the gaseous discharge, and the substrate acts as the anode.

Energetic ions, typically argon ions, bombard the target, causing the ejection of target atoms.

These atoms then impinge on the substrate, forming a coating.

DC sputtering is a specific type of cathode sputtering that utilizes a DC gaseous discharge.

The target serves as the deposition source, the substrate and vacuum chamber walls may act as the anode, and the power supply is a high-voltage DC source.

Continue exploring, consult our experts

What is a Cathode Sputtering? 5 Key Points to Understand the Process

Looking for high-quality cathode sputtering equipment for your lab or research facility? Look no further than KINTEK! Our state-of-the-art machines are designed to deliver precise and efficient sputtering processes, allowing you to deposit thin films with ease. Whether you need sputter coating for electron microscopy or other applications, our equipment will meet your needs. Don't compromise on quality - choose KINTEK for all your cathode sputtering requirements. Contact us today for more information and a personalized quote!

Related Products

Boron Carbide (BC) Sputtering Target / Powder / Wire / Block / Granule

Boron Carbide (BC) Sputtering Target / Powder / Wire / Block / Granule

Get high-quality Boron Carbide materials at reasonable prices for your lab needs. We customize BC materials of different purities, shapes, and sizes, including sputtering targets, coatings, powders, and more.

Electron Beam Evaporation Coating Oxygen-Free Copper Crucible

Electron Beam Evaporation Coating Oxygen-Free Copper Crucible

Electron Beam Evaporation Coating Oxygen-Free Copper Crucible enables precise co-deposition of various materials. Its controlled temperature and water-cooled design ensure pure and efficient thin film deposition.

Plasma enhanced evaporation deposition PECVD coating machine

Plasma enhanced evaporation deposition PECVD coating machine

Upgrade your coating process with PECVD coating equipment. Ideal for LED, power semiconductors, MEMS and more. Deposits high-quality solid films at low temps.

High Purity Cobalt (Co) Sputtering Target / Powder / Wire / Block / Granule

High Purity Cobalt (Co) Sputtering Target / Powder / Wire / Block / Granule

Get affordable Cobalt (Co) materials for laboratory use, tailored to your unique needs. Our range includes sputtering targets, powders, foils, and more. Contact us today for customized solutions!

High Purity Chromium (Cr) Sputtering Target / Powder / Wire / Block / Granule

High Purity Chromium (Cr) Sputtering Target / Powder / Wire / Block / Granule

Get affordable Chromium materials for your laboratory needs. We produce custom shapes and sizes, including sputtering targets, foils, powders, and more. Contact us today.

RF PECVD System Radio Frequency Plasma-Enhanced Chemical Vapor Deposition

RF PECVD System Radio Frequency Plasma-Enhanced Chemical Vapor Deposition

RF-PECVD is an acronym for "Radio Frequency Plasma-Enhanced Chemical Vapor Deposition." It deposits DLC (Diamond-like carbon film) on germanium and silicon substrates. It is utilized in the 3-12um infrared wavelength range.

Electron Gun Beam Crucible

Electron Gun Beam Crucible

In the context of electron gun beam evaporation, a crucible is a container or source holder used to contain and evaporate the material to be deposited onto a substrate.

Electron Beam Evaporation Graphite Crucible

Electron Beam Evaporation Graphite Crucible

A technology mainly used in the field of power electronics. It is a graphite film made of carbon source material by material deposition using electron beam technology.

Spark plasma sintering furnace SPS furnace

Spark plasma sintering furnace SPS furnace

Discover the benefits of Spark Plasma Sintering Furnaces for rapid, low-temperature material preparation. Uniform heating, low cost & eco-friendly.

High Purity Tin (Sn) Sputtering Target / Powder / Wire / Block / Granule

High Purity Tin (Sn) Sputtering Target / Powder / Wire / Block / Granule

Looking for high-quality Tin (Sn) materials for laboratory use? Our experts offer customizable Tin (Sn) materials at reasonable prices. Check out our range of specifications and sizes today!

Copper Zirconium Alloy (CuZr) Sputtering Target / Powder / Wire / Block / Granule

Copper Zirconium Alloy (CuZr) Sputtering Target / Powder / Wire / Block / Granule

Discover our range of Copper Zirconium Alloy materials at affordable prices, tailored to your unique requirements. Browse our selection of sputtering targets, coatings, powders, and more.

Titanium Carbide (TiC) Sputtering Target / Powder / Wire / Block / Granule

Titanium Carbide (TiC) Sputtering Target / Powder / Wire / Block / Granule

Get high-quality Titanium Carbide (TiC) materials for your lab at affordable prices. We offer a wide range of shapes and sizes, including sputtering targets, powders, and more. Tailored to your specific needs.


Leave Your Message