The four types of vacuum pumps commonly used are rotary vane pumps, roots pumps, oil diffusion pumps, and turbomolecular pumps. Each type is designed to achieve specific vacuum pressures and is chosen based on the requirements of the application process.
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Rotary Vane Pumps: These pumps use a mechanism where a number of vanes mounted in a rotor slide in and out of slots in the pump housing as the rotor turns. The vanes trap and compress air, which is then expelled through an exhaust valve. Rotary vane pumps are effective in achieving rough vacuum levels, typically up to 5x10-2 mbar. They are widely used in applications requiring moderate vacuum levels and are known for their reliability and durability.
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Roots Pumps (or Rotary Blower Pumps): These pumps operate on the principle of positive displacement, where two rotors in close tolerance rotate in opposite directions, trapping and expelling gas. Roots pumps are often used in conjunction with rotary vane pumps to enhance the pumping speed and achieve higher vacuum levels. They are particularly useful in applications requiring rapid evacuation of large volumes of gas.
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Oil Diffusion Pumps: These pumps are designed to achieve high vacuum levels. They operate by directing a high-speed jet of oil vapor against the incoming gas molecules, which are then directed downwards and collected at the bottom of the pump. The gas is then pumped out by a backing pump. Oil diffusion pumps are capable of achieving vacuum levels down to 10-5 mbar and are commonly used in scientific research and high-vacuum industrial processes.
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Turbomolecular Pumps: These pumps use high-speed rotating blades to impart momentum to gas molecules, effectively transferring them from the inlet to the exhaust of the pump. Turbomolecular pumps are capable of achieving very high vacuum levels, typically down to 10-9 mbar. They are used in applications requiring ultra-high vacuum, such as semiconductor manufacturing and analytical instruments like mass spectrometers.
Each of these pump types operates within a specific range of vacuum levels and is chosen based on the specific needs of the application, including the required vacuum level, pumping speed, and the nature of the gases being handled.
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