A diffuse pump, also known as a diffusion pump, is a type of vacuum pump that operates without moving parts.
It uses the vapor of a boiling fluid to capture and move air molecules.
This pump is categorized as a fluid entrainment pump, distinct from mechanical pumps that use pistons, fins, or lobes to displace air.
5 Key Points to Understand
1. Principle of Operation
Diffusion pumps rely on the momentum transfer from the high-speed vapor jets to the gas molecules in the vacuum chamber.
The vapor, typically oil-based, is heated until it vaporizes and is directed through nozzles at high speeds.
These jets create a high-velocity flow that sweeps up the gas molecules in the chamber, effectively lowering the pressure.
2. Fluid Types
The reference mentions two specific types of fluids used in diffusion pumps: polyphenyl ether and perfluoropolyether.
Polyphenyl ether is valued for its low vapor pressure and resistance to electron bombardment, making it suitable for specific high-tech applications.
Perfluoropolyether, on the other hand, is a highly inert compound due to its fluorine-rich structure, which makes it resistant to various chemicals and environmental factors.
However, its decomposition products are toxic, necessitating careful handling.
3. Maintenance and Efficiency
The operation of a diffusion pump is relatively maintenance-free, primarily requiring attention to the quality and level of the oil used.
High-quality oil ensures optimal performance and reduces the need for frequent maintenance.
The pump's heating system, which is crucial for vaporizing the oil, must also be regularly checked to ensure proper functioning.
4. Applications and Performance
Diffusion pumps are capable of achieving high vacuum levels, ranging from 10^-2 to 10^-10 torr.
This makes them suitable for various industrial applications such as electron-beam microscopy, vacuum deposition, coatings, and vacuum furnaces.
Their durability and reliability stem from the absence of moving parts, which also simplifies their operation and maintenance.
5. Unique Design and Operation
A diffusion pump is a robust and efficient tool for creating high vacuums.
It leverages the kinetic energy of vaporized fluid to entrain and remove gas molecules from a chamber.
Its design and operation are distinct from mechanical pumps, offering a unique solution for high-vacuum requirements in various industries.
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