Silicon carbide (SiC) is a material that is used in various applications within the semiconductor industry.
This is due to its unique properties, which include a wide band gap, high thermal conductivity, high electron mobility, and superior breakdown electric field strength.
These characteristics make SiC an ideal material for power semiconductor devices.
It addresses the limitations of traditional materials like silicon (Si) and gallium arsenide (GaAs).
What is Silicon Carbide Used for in Semiconductor? 7 Key Applications
1. Semiconductor Manufacturing Equipment
SiC is used in the fabrication of components for semiconductor manufacturing equipment.
These components include susceptors, slip rings, lift pins, electrodes, focus rings, and chamber liners.
They are crucial in processes like rapid thermal processing (RTP), plasma etch, chemical vapor deposition (CVD), epitaxy, ion implantation, lithography, and various cleaning methods.
The use of SiC in these applications is due to its resistance to high temperatures and corrosive environments.
2. Power Semiconductor Devices
SiC's properties make it an excellent material for power devices.
These devices are essential in applications requiring high efficiency and power density.
SiC power devices, such as diodes and transistors, can operate at higher temperatures, frequencies, and voltages than their silicon counterparts.
This capability is particularly beneficial in electric vehicles, renewable energy systems, and industrial motor drives.
3. Conductive Ceramics
SiC ceramics can be made conductive, which improves their machinability.
This allows for electric discharge machining.
This is particularly useful for manufacturing large or complex-shaped SiC ceramic parts.
When the resistivity of SiC ceramics is reduced to below 100Ω·cm, they can be accurately and rapidly machined.
This facilitates the production of intricate components.
4. Corrosive Environments
SiC's excellent chemical and physical stability makes it an ideal material for components exposed to corrosive environments.
These include desulfurization nozzles in power plants and components in chemical pumps.
These applications benefit from SiC's resistance to acids, alkalis, and other corrosive media.
This ensures long-term, maintenance-free operation.
5. High-Temperature Applications
SiC is widely used in high-temperature applications.
These include electric heating elements in industrial furnaces and kiln furniture in ceramics and glass industries.
Its high thermal conductivity and resistance to thermal shock make it suitable for these demanding environments.
6. Defense and Military
In the defense sector, SiC ceramics are used as bulletproof armor.
This is due to their high hardness and lightweight properties.
They offer better protection with less weight compared to other materials.
This enhances the mobility and effectiveness of protective gear.
7. Wear Resistance
Due to its high hardness, SiC is used in abrasives and wear-resistant components.
These include sealing rings and bearings.
These applications benefit from SiC's low friction coefficient and excellent wear resistance.
This ensures durability and longevity in mechanical parts.
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