Gold coating for SEM (Scanning Electron Microscopy) is crucial for enhancing image quality and preventing sample damage.
5 Key Insights into Gold Coating for SEM
1. Thickness Range
The typical thickness of gold coating for SEM applications ranges from 2 to 20 nanometers (nm).
2. Sputter Coating Process
This ultra-thin layer of gold is applied using a process called sputter coating.
3. Purpose of Coating
The primary purpose of this coating is to prevent charging of the specimen and to enhance the detection of secondary electrons.
4. Gold's Advantages
Gold is the most commonly used material due to its low work function, making it very efficient for coating.
5. Specific Applications
In specific applications, such as coating a 6" wafer with gold/palladium (Au/Pd), a thickness of 3 nm was used.
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