The typical thickness of gold coating for SEM (Scanning Electron Microscopy) applications ranges from 2 to 20 nm. This ultra-thin layer of gold is applied using a process called sputter coating, which involves depositing a conductive metal onto non-conductive or poorly conductive specimens. The primary purpose of this coating is to prevent charging of the specimen due to the accumulation of static electric fields and to enhance the detection of secondary electrons, thereby improving the signal to noise ratio and the overall image quality in the SEM.
Gold is the most commonly used material for this type of coating due to its low work function, making it very efficient for coating. When using cool sputter coaters, the process of sputtering thin layers of gold results in minimal heating of the sample surface. The grain size of the gold coating, which is visible under high magnifications in modern SEMs, typically ranges from 5 to 10 nm. This is particularly important for maintaining the integrity and visibility of the sample under examination.
In specific applications, such as the coating of a 6" wafer with gold/palladium (Au/Pd), a thickness of 3 nm was used. This was achieved using the SC7640 Sputter Coater with settings of 800V and 12mA, using argon gas and a vacuum of 0.004 bar. The even distribution of this thin coating across the entire wafer was confirmed through subsequent tests.
Overall, the thickness of gold coating in SEM applications is meticulously controlled to ensure optimal performance without altering the sample's characteristics significantly. The choice of gold as a coating material is strategic, considering its conductive properties and minimal interference with the sample's analysis, especially when using techniques like Energy Dispersive X-ray Spectroscopy (EDX).
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