A diffusion vacuum pump is a type of vacuum pump that operates without moving parts, utilizing the vapor of a boiling fluid to capture and remove air molecules from a chamber, thereby achieving high vacuum levels ranging from 10^-2 to 10^-10 torr. This type of pump is distinct from mechanical pumps, which use physical mechanisms like pistons or fins to displace air. Diffusion pumps are classified as fluid entrainment pumps, where the working fluid's vapor acts to entrap air molecules, which are then directed and cooled, releasing the air molecules at a different location. This process is crucial in various industrial applications such as electron-beam microscopy, vacuum deposition, coatings, and vacuum furnaces.
The operation of a diffusion vacuum pump involves the use of a holding pump to maintain low pressure on the foreline, ensuring that pump oils do not backstream into the chamber. This is achieved through automatic and interlocked vacuum pumpdown, combined with the proper sequencing of vacuum valves. The pump's design and operation are optimized to prevent contamination of the vacuum chamber with pump fluid, which is essential for maintaining the integrity of the vacuum environment.
In vacuum systems, diffusion pumps are often used in conjunction with other types of pumps, such as mechanical or rotary vane pumps, to achieve the desired level of vacuum. The mechanical pumps are typically used for initial pumpdown from atmospheric pressure to an intermediate level, while diffusion pumps are employed for achieving pressures lower than what mechanical pumps alone can generate. This combination of pumps is common in vacuum furnaces and other high-vacuum applications where maintaining a clean and stable vacuum environment is critical.
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