In thermal evaporation, the boat used is typically a two-component ceramic boat.
This boat is made from a combination of titanium diboride and boron nitride.
This combination is chosen because it can withstand high temperatures.
It also maintains electrical conductivity and remains inert towards molten metals, especially aluminum.
What is the Widely Used Boat Made of in Thermal Evaporation? (4 Key Points)
1. Material Composition
The evaporation boat is made from a mixture of titanium diboride (TiB2) and boron nitride (BN).
Titanium diboride is selected for its excellent thermal resistance and its inertness to non-ferrous metal melts.
It also enhances the wettability of the boat with liquid aluminum, which is crucial for processes involving aluminum vapor deposition.
Boron nitride is added to adjust the electrical resistance of the boat, as it is a non-conductive material.
2. Functionality
The primary function of the evaporation boat is to act as a receptacle for the material to be evaporated, typically metals like aluminum.
It serves as an electrical resistance heater, where the boat and a continuously fed metal wire are heated under high vacuum conditions by the flow of current.
This heating process melts the wire and subsequently evaporates it, facilitating thin-film deposition.
3. Operational Requirements
The boat must operate at temperatures significantly higher than the evaporation temperature of the material it contains.
This requirement ensures efficient and consistent evaporation of the material.
The design and material composition of the boat are crucial for maintaining these high temperatures without degradation or reaction with the molten metal.
4. Versatility and Customization
Evaporation boats are popular in various thin film coating processes due to their ease of use and wide range of capacities.
They can be custom manufactured to suit specific needs, ensuring compatibility with different materials and evaporation rates.
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