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Molybdenum / Tungsten / Tantalum Evaporation Boat

Thin Film Deposition Parts

Molybdenum / Tungsten / Tantalum Evaporation Boat

Item Number : KME01

Price varies based on specs and customizations


Material
Tungsten / Molybdenum / Tantalum
Specification
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Introduction

Evaporation boats are used in the resistance evaporation process to heat and evaporate materials. They are made of materials with low vapor pressures, such as tungsten, molybdenum, molybdenum-lanthanum (ML), molybdenum-yttrium oxide (MY), or tantalum, to ensure that no particles of the boat material enter the vapor and the final layer. Evaporation boats have excellent corrosion resistance, low vapor pressures, good electrical conductivity, a very high melting point, and are dimensionally stable.

Application 

Evaporation boat sources are used in thermal evaporation systems to deposit metals, alloys, and materials. They come in different thicknesses made of tungsten, tantalum, and molybdenum, ensuring compatibility with various power sources. These boats are crucial for vacuum evaporation and thin film deposition, including electron beam fabrication. They are widely employed in industries such as vacuum coating, electronics, solar energy, and metallurgy. To prevent cracking, gradual heating of the container is essential. Evaporation boats are versatile tools playing a vital role in materials analysis and thin film deposition processes.

Molybdenum, tungsten, and tantalum evaporation boats find applications in various industries, including:

  • Vacuum evaporation of materials
  • Carrying boats in furnace machines
  • Rare earth industry
  • Nuclear fuel sintering
  • Capacitor discharge sintering

Detail & Parts

Molybdenum / Tungsten / Tantalum Evaporation Boat detail 1

Molybdenum / Tungsten / Tantalum Evaporation Boat detail 2

Molybdenum / Tungsten / Tantalum Evaporation Boat detail 3

Length 100 width 8 thickness 0.2/0.3mm Length 100 width 15 thickness 0.2/0.3/0.5mm Length 100 width 20 thickness 0.2/0.3/0.5mm Groove size: length 50 deep 2.6

Principle

Molybdenum/tungsten/tantalum evaporation boats are used in thermal evaporation systems to deposit a wide range of metals, alloys, and materials. The boats are heated by passing an electric current through them, which causes the material to evaporate. The evaporated material then condenses on the substrate, forming a thin film. The thickness of the film can be controlled by the amount of current passed through the boat and the evaporation time.

Advantages

  • Excellent corrosion resistance
  • Low vapor pressures
  • Good electrical conductivity
  • Very high melting point
  • Dimensionally stable

FAQ

What Are Tungsten Boats?

Tungsten boats are small containers or trays made from tungsten metal. They are designed to hold and transport materials at high temperatures in various industrial and laboratory applications. Tungsten boats are commonly used in processes such as evaporation, sintering, and thermal analysis.

What Are The Advantages Of Using Tungsten Boats?

Tungsten boats offer several advantages in high-temperature applications. Firstly, tungsten has an extremely high melting point of 3,422°C, making it suitable for use in environments with extremely high temperatures. Tungsten boats also have excellent thermal conductivity, allowing for efficient heat transfer and uniform heating of the material being processed. They have high mechanical strength and can withstand deformation and warping even at elevated temperatures. Tungsten is highly resistant to chemical corrosion, making tungsten boats compatible with a wide range of materials and environments. Additionally, tungsten has a low vapor pressure, which means it has minimal vapor contamination, making it suitable for high-purity applications. Tungsten boats have a long lifespan and can be used repeatedly without significant deterioration.

What Are Thermal Evaporation Sources?

Thermal evaporation sources are devices used in thermal evaporation systems to deposit thin films onto substrates. They work by heating a material (evaporant) to high temperatures, causing it to evaporate and then condense onto a substrate, forming a thin film.

Precautions For Using Evaporation Boats.

Put the item to be analyzed into a crucible or a saggar and heat it; the increase and decrease of the heating temperature depends on the characteristics of the equipment and product; heating or cooling too fast will cause the evaporation boat to break. Your best bet is to slow down the heating process, which will extend the life of your boat.

What Are The Main Types Of Thermal Evaporation Sources?

The main types of thermal evaporation sources include resistive evaporation sources, electron-beam evaporation sources, and flash evaporation sources. Each type uses different methods to heat the evaporant, such as resistive heating, electron beam heating, or direct contact with a hot surface.

How Do Thermal Evaporation Sources Work?

Thermal evaporation sources work by passing electrical current through a resistive material, which heats up to high temperatures. This heat is transferred to the evaporant, causing it to melt and vaporize. The vapor then travels through a vacuum chamber and condenses onto a substrate, forming a thin film.

What Are The Advantages Of Using Evaporation Boats?

Evaporation boats offer several advantages in thin film deposition processes. They provide a controlled environment for the evaporation of materials, ensuring precise control over film thickness and uniformity. Evaporation boats can withstand high temperatures and provide efficient heat transfer, allowing for consistent evaporation rates. They are available in various sizes and shapes, accommodating different evaporation systems and substrate configurations. Evaporation boats enable the deposition of a wide range of materials, including metals, semiconductors, and ceramics. They are easy to load and unload, facilitating quick material changes or process adjustments. Overall, evaporation boats are essential tools in thin film deposition techniques, offering versatility, reliability, and reproducibility.

What Are The Advantages Of Using Thermal Evaporation Sources?

The advantages of thermal evaporation sources include high deposition rates, good directionality, excellent uniformity, and compatibility with various materials. They are also relatively simple and affordable, making them suitable for a wide range of applications in thin film deposition.

What Is The Typical Lifespan Of An Evaporation Boat?

The lifespan of an evaporation boat can vary depending on several factors. It primarily depends on the material used for the boat, the operating conditions, and the frequency of use. Evaporation boats made of refractory metals like tungsten or molybdenum are generally more durable and have longer lifespans compared to boats made from ceramic materials. With proper handling, regular maintenance, and appropriate cleaning procedures, evaporation boats can typically be used for multiple deposition cycles. However, over time, evaporation boats may experience wear and tear, such as cracking or degradation, which may reduce their lifespan. It is important to monitor the condition of the evaporation boat, conduct regular inspections, and replace it when necessary to ensure consistent and reliable thin film deposition.

What Applications Are Thermal Evaporation Sources Used For?

Thermal evaporation sources are used in various applications such as the production of optical coatings, semiconductor devices, and various types of thin films. They are particularly useful in industries that require precise control over the deposition of materials onto substrates.

Can Evaporation Boats Be Reused?

Evaporation boats can be reused, but it depends on several factors. The boat's condition, cleanliness, and compatibility with different evaporant materials play a significant role in determining whether it can be reused. If the evaporation boat is in good condition, free from cracks or defects, and has been cleaned thoroughly, it can typically be reused for subsequent depositions. However, if the boat has been exposed to reactive materials or shows signs of degradation, it may not be suitable for reuse. Consider the potential for contamination or unwanted reactions when reusing evaporation boats. Regular inspection and proper cleaning procedures are essential to maintain the boat's performance and ensure its suitability for reuse.

How Do You Select The Appropriate Evaporation Boat Material?

The selection of the appropriate evaporation boat material depends on several factors. Consider the melting point of the material being evaporated and choose a boat material with a higher melting point to prevent boat failure. Also, consider the compatibility of the boat material with the evaporant to avoid reactions or contamination. The boat's thermal conductivity and heat capacity should be evaluated for efficient heat transfer and temperature control during evaporation. Additionally, consider the boat's mechanical properties, such as strength and durability, to ensure it can withstand repeated heating and cooling cycles.
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