Materials used in thermal evaporation include a variety of sources and shapes, primarily designed to facilitate the heating and evaporation of materials in a high vacuum environment. The sources are typically made from materials like tungsten, tantalum, or molybdenum, and come in forms such as boats, baskets, filaments, and coated rods. These sources are designed to withstand high temperatures and to effectively heat the evaporation materials, which can be in shapes like chunks, foils, pellets, wires, rods, shots, and slugs.
Thermal Evaporation Sources:
- Boats: These are commonly used and come in various sizes. Larger boats generally require higher power for the same deposition rate but can handle higher maximum deposition rates.
- Baskets and Filaments: These are also used, often supporting crucibles or directly heating the evaporation materials.
- Coated Rods: These may have a passive material coating, such as aluminum oxide, to enhance their performance or durability.
Types of Materials Used:
- Metals: Common metals used include gold, silver, titanium, and copper. These materials are chosen for their conductivity, malleability, and resistance to corrosion.
- Semiconductors: Materials like silicon dioxide are used in applications requiring specific electrical properties.
- Refractory Metals: Tungsten and molybdenum are used due to their high melting points and durability under intense heat.
Techniques for Heating:
- Resistive Heating Evaporation: The material is heated in a resistively heated crucible, and the vapor condenses on the substrate.
- Electron Beam Evaporation: An electron beam is focused on the material, causing rapid heating and evaporation.
- Flash Evaporation: The material is quickly heated to its evaporation temperature using a high-current pulse or intense heat source.
- Induction Heating Evaporation: Induction heating induces currents in the source material, leading to heating and evaporation.
Process Overview: Thermal evaporation involves heating a solid material inside a high vacuum chamber until it boils and evaporates, producing a vapor pressure. This vapor forms a cloud that travels across the chamber and deposits on the substrate as a thin film. The vacuum environment ensures that the vapor stream travels without reacting or scattering against other atoms.
This detailed explanation covers the materials and methods used in thermal evaporation, providing a comprehensive understanding of the process and its applications in various industries.
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