Target sputtering deposition is a process used to create thin films by ejecting atoms from a solid target material through bombardment by energetic particles.
This technique is widely used in the manufacturing of semiconductors and computer chips.
5 Key Steps Explained
1. Target Material
The target material is the source of atoms for the thin film deposition.
It is usually a metallic element or alloy, chosen based on the desired properties of the thin film, such as conductivity, hardness, or optical properties.
Ceramic targets are used when a hardened coating is required, such as for tools.
2. Energetic Particle Bombardment
The target is bombarded with energetic particles, typically ions from a plasma.
These ions have sufficient energy to cause collision cascades within the target material.
When these cascades reach the surface of the target with enough energy, they eject atoms from the target.
The process is influenced by factors such as the ion's incident angle, energy, and the masses of the ion and target atoms.
3. Sputter Yield
The sputter yield is the average number of atoms ejected per incident ion.
It is a critical parameter in the sputtering process as it determines the efficiency of the deposition.
The yield depends on several factors including the surface binding energy of the target atoms and the orientation of crystalline targets.
4. Deposition onto Substrate
The ejected atoms from the target travel through the chamber and deposit onto a substrate.
The deposition occurs under controlled conditions, often in a vacuum or low-pressure gas environment, to ensure the atoms deposit uniformly, forming a thin film of consistent thickness.
5. Types of Sputter Deposition
Sputter deposition can be performed under different conditions, ranging from high vacuum to higher gas pressures.
In high vacuum conditions, the sputtered particles do not undergo gas-phase collisions, allowing for direct deposition onto the substrate.
In higher gas pressure conditions, the particles are thermalized by gas-phase collisions before reaching the substrate, which can affect the properties of the deposited film.
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