Thermal evaporation sources are essential components in various scientific and industrial processes. They are used to vaporize materials at high temperatures for deposition onto substrates. The materials used in these sources are carefully chosen for their unique properties.
5 Key Points to Know About Materials Used in Thermal Evaporation Sources
1. Primary Materials: Tungsten, Molybdenum, and Tantalum
These materials are the most commonly used in thermal evaporation sources. They are chosen for their high purity, high melting points, and low vapor pressures. This makes them ideal for resistively heated evaporation sources.
2. Refractory Properties
Tungsten, molybdenum, and tantalum are known for their refractory properties. This means they can withstand extremely high temperatures without degrading. This is crucial for the evaporation process, where the source material is heated to its melting point or above.
3. Different Forms of Evaporation Sources
Thermal evaporation sources come in various forms to suit different needs:
- Boats: These are commonly used and come in various sizes. Larger boats require higher power but can handle higher deposition rates.
- Baskets: These are suitable for supporting crucibles and are used for materials that need containment during evaporation.
- Filaments: These are typically used for materials that can be evaporated at lower temperatures or for smaller scale applications.
- Coated Rods: These might be used where a specific surface coating is required to enhance the evaporation process or to prevent contamination.
4. Applications and Design
The design of the evaporation source is critical for specific applications, such as OLED and multiple coating in flat panel display manufacturing. The sources are designed to optimize the evaporation process, ensuring efficient and uniform deposition of materials.
5. Power Supply and Control
Thermal evaporation sources typically require an electric power source with low voltage and high currents. The power demand is usually high, especially for boat evaporation sources. To control the evaporation speed and deposition rate, thermal evaporation systems often use quartz crystal microbalances (QCMs) and other software or hardware configurations.
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