The materials used in thermal evaporation sources primarily include tungsten, molybdenum, and tantalum. These materials are chosen for their high purity, high melting points, and low vapor pressures, making them suitable for resistively heated evaporation sources. These sources come in various forms such as boats, baskets, filaments, and coated rods, each designed to support different types of evaporants and applications.
Tungsten, Molybdenum, and Tantalum: These materials are commonly used in the fabrication of evaporation sources due to their refractory properties. They can withstand high temperatures without significant degradation, which is crucial for the evaporation process where the source material is heated to its melting point or above to vaporize and deposit on a substrate.
Forms of Evaporation Sources:
- Boats: These are commonly used and come in various sizes. Larger boats require higher power for the same deposition rate but can handle higher maximum deposition rates.
- Baskets: These include those suitable for supporting crucibles and are used for materials that might require containment during evaporation.
- Filaments: These are typically used for materials that can be evaporated at lower temperatures or for smaller scale applications.
- Coated Rods: These might be used where a specific surface coating is required to enhance the evaporation process or to prevent contamination.
Applications and Design: The design of the evaporation source is critical for specific applications such as OLED/multiple coating in flat panel display manufacturing. The sources are specifically designed to optimize the evaporation process, ensuring efficient and uniform deposition of materials.
Power Supply and Control: Thermal evaporation sources typically require an electric power source with low voltage and high currents. The power demand is usually high, especially for boat evaporation sources. To control the evaporation speed and deposition rate, thermal evaporation systems often use quartz crystal microbalances (QCMs) and other software or hardware configurations to manage the evaporation rate and film properties.
Evaporant Materials: The materials that are evaporated in these sources can include a wide range of metals, alloys, and ceramics. Common examples include chrome, aluminum, silver, gold, and others. The choice of evaporant depends on the desired properties of the deposited film and the specific requirements of the application.
In summary, the materials used in thermal evaporation sources are primarily refractory metals like tungsten, molybdenum, and tantalum, fabricated into various forms such as boats, baskets, filaments, and coated rods to accommodate different evaporants and applications. These sources are designed to withstand high temperatures and provide efficient, controlled evaporation for a variety of materials.
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