Thermal evaporation sources are essential for depositing various materials.
These sources primarily include boats, baskets, filaments, and coated rods.
They are typically made from materials like tungsten, tantalum, or molybdenum.
The heating methods for these sources are either filament evaporation or electron beam (E-Beam) evaporation.
5 Key Types Explained
1. Boats
Boats are a common type of thermal evaporation source.
They come in various sizes.
Larger boats generally require higher power for the same deposition rate.
However, they can handle higher maximum deposition rates.
2. Filament Evaporation
Filament evaporation involves the use of a simple electrical heating element.
This method is straightforward and relies on the resistance of the filament to generate heat.
3. E-Beam Evaporation
E-Beam evaporation uses an electron beam to heat the source material directly.
This method is particularly useful for materials that are refractory or require higher temperatures to evaporate.
4. Thin Film Evaporation Systems
Thin film evaporation systems offer advantages such as high deposition rates.
They also provide real-time rate and thickness control.
Good directional control of the evaporant stream is beneficial for processes like Lift Off to achieve direct patterned coatings.
5. Thermal Evaporation Materials
Thermal evaporation materials include various substances such as gold, silver, titanium, silicon dioxide, tungsten, and copper.
These materials can sublime or evaporate at temperatures near their melting points, depending on their vapor pressure.
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