Thermal evaporation sources primarily include boats, baskets, filaments, and coated rods, typically made from materials like tungsten, tantalum, or molybdenum. The heating methods for these sources are either filament evaporation, using electrical heating elements, or electron beam (E-Beam) evaporation, where an electron beam heats the source material.
Boats are a common type of thermal evaporation source and come in various sizes. Larger boats generally require higher power for the same deposition rate but can handle higher maximum deposition rates.
Filament Evaporation involves the use of a simple electrical heating element, or filament, to heat the source material. This method is straightforward and relies on the resistance of the filament to generate heat.
E-Beam Evaporation uses an electron beam to heat the source material directly, causing it to evaporate. This method is particularly useful for materials that are refractory or require higher temperatures to evaporate.
Thin Film Evaporation systems offer advantages such as high deposition rates, real-time rate and thickness control, and good directional control of the evaporant stream, which is beneficial for processes like Lift Off to achieve direct patterned coatings.
Thermal Evaporation Materials include various substances such as gold, silver, titanium, silicon dioxide, tungsten, and copper. These materials can sublime or evaporate at temperatures near their melting points, depending on their vapor pressure.
The development of thermal evaporation technology has evolved significantly since its initial use in 1912, with advancements such as the introduction of e-beam evaporation and evaporation into plasmas, which expanded the technique into reactive evaporation.
In summary, thermal evaporation sources are crucial for the deposition of various materials and are heated either by electrical filaments or electron beams. These sources are made from high-temperature materials and are designed to withstand the heat generated during the evaporation process. The choice of source and heating method depends on the specific requirements of the material being evaporated and the desired deposition characteristics.
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