The frequency of Mpcvd is 2.45 GHz. This is the frequency at which the microwave generator in the MPCVD system operates. The microwave radiation is used to generate plasma in the vacuum chamber, creating an ideal environment for diamond deposition. The electrons in the plasma absorb energy from the microwave radiation, reaching temperatures up to 5273 K. The most commonly used microwave frequencies for this method are 2.45 GHz and 915 MHz.
The MPCVD method has several advantages over other diamond synthesis methods. Compared to the DC-PJ CVD method, MPCVD allows for smooth and continuous adjustment of microwave power and stable control of the reaction temperature. This helps avoid the problem of crystal seeds falling off the substrate due to arcing and flame failure. By adjusting the structure of the reaction chamber and controlling the microwave power and pressure, a large area of stable discharge plasma can be obtained, which is necessary for the production of high-quality, large-size single crystal diamonds. Therefore, the MPCVD method is considered to be the most promising diamond synthesis method for industrial applications.
In addition to its advantages in diamond synthesis, the MPCVD method is also used in other applications such as the fabrication of graphene. The frequency of 2.45 GHz is used in the design of MPECVD chambers for thin film cell production systems. The placement of slots in the chamber affects the resonant mode, with the middle and bottom positions producing the TE111 and TM011 modes, respectively, at 2.45 GHz.
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