Chemical Vapor Deposition CVD Equipment System Chamber Slide PECVD Tube Furnace with Liquid Gasifier PECVD Machine

Introduction

The Slide PECVD Tube Furnace With Liquid Gasifier PECVD Machine is a versatile and high-performance system designed for a wide range of thin film deposition applications. It features a 500W RF plasma source, slide-out furnace, precise gas flow control, and a vacuum station. The system offers advantages such as automatic plasma matching, high-speed heating and cooling, programmable temperature control, and a user-friendly interface. It is widely used in research and production environments for depositing thin films in various industries, including electronics, semiconductors, and optics.

Applications

Slide PECVD Tube Furnace With Liquid Gasifier PECVD Machine finds its applications in:

• Chemical Vapor Deposition (CVD)
• Plasma Enhanced Chemical Vapor Deposition (PECVD)
• Thin film deposition
• Solar cell fabrication
• Semiconductor processing
• Nanotechnology
• Materials science
• Research and development

Different temperature and setup CVD systems available

Principle

The Slide PECVD Tube Furnace With Liquid Gasifier PECVD Machine employs low-temperature plasma to generate a glow discharge in the process chamber's cathode (sample tray). The glow discharge (or another heat source) raises the sample's temperature to a predetermined level. Then, controlled amounts of process gas are introduced, undergoing chemical and plasma reactions to form a solid film on the sample's surface.

Features

The Slide PECVD Tube Furnace With Liquid Gasifier PECVD Machine offers numerous benefits to users:

• Enhanced power generation for solar cell wafers: The innovative graphite boat structure significantly improves the power output of solar cells.
• Elimination of color difference in tubular PECVD cells: This equipment effectively addresses the issue of color variation in tubular PECVD cells.
• Wide output power range (5-500W): The RF plasma automatic matching source provides a versatile range of output power, ensuring optimal performance for various applications.
• High-speed heating and cooling: The furnace chamber sliding system enables rapid heating and cooling, reducing processing time. Auxiliary forced air circulation further accelerates the cooling rate.
• Automated sliding movement: The optional sliding movement feature allows for automatic operation, enhancing efficiency and reducing manual intervention.
• Precise temperature control: PID programmable temperature control ensures accurate temperature regulation, supporting remote and centralized control for added convenience.
• High-accuracy MFC mass flowmeter control: The MFC mass flowmeter precisely controls source gases, ensuring a stable and consistent gas supply.
• Versatile vacuum station: The stainless steel vacuum flange with multiple adapting ports accommodates various vacuum pump station configurations, ensuring a high vacuum degree.
• User-friendly interface: The CTF Pro 7-inch TFT touch screen controller simplifies program setting and allows for easy analysis of historical data.

Advantages

• RF plasma automatic matching source, wide 5-500W output power range stable output
• Furnace chamber sliding system for high speed heating and short time cooling, auxiliary fast cooling and automatic sliding movement are available
• PID programmable temperature control,excellent control accuracy and support remote control and centralized control 
• High accuracy MFC mass flowmeter control, source gases premixing and stable gas supply speed
• Stainless steel vacuum flange with various adapting port to meet different vacuum pump station setup, good sealing and high vacuum degree
• CTF Pro applies one 7 inches TFT touch screen controller, more friendly program setting and history data analysis

Safety Advantage

• Kindle Tech tube furnace owns over current protection and over temperature alarming function, furnace will turn off the power automatically
• Furnace build in thermal couple detecting function, furnace will stop heating and alarm will be on once broken or failure detected
• PE Pro support power failure restarting function,furnace will resume the furnace heating program when power is incoming after failure

Technical specifications

Standard Package

Optional Setup

• In tube gases detecting and monitoring,like H2, O2 and so on
• Independent furnace temperature monitoring and recording
• RS 485 communication port for PC remote control and data exporting
• Insert gases feeding flow rate control,like mass flowmeter and float flowmeter
• Touch screen temperature controller with versatile operator friendly functions
• High vacuum pump station setups, like vane vacuum pump,molecular pump,diffusion pump

Warnings

Operator safety is the top important issue! Please operate the equipment with cautions. Working with inflammable& explosive or toxic gases is very dangerous, operators must take all necessary precautions before starting the equipment. Working with positive pressure inside the reactors or chambers is dangerous, operator must fellow the safety procedures strictly. Extra caution must also be taken when operating with air-reactive materials, especially under vacuum. A leak can draw air into the apparatus and cause a violent reaction to occur.

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