Laboratory Rapid Thermal Processing (RTP) Quartz Tube Furnace

Introduction

The RTP (Rapid Thermal Processing) Tube Furnace is engineered to reach target temperatures almost instantaneously. It is widely used for Chemical Vapor Deposition (CVD), particularly in the growth of large-area graphene. Configurable with various vacuum pump stations, the system operates effectively under both controlled atmospheres and high-vacuum environments.

The furnace achieves exceptional performance with a maximum heating rate of 100°C/s and a cooling rate of 110°C/s. It features a sliding rail mechanism for the tube flange, allowing for easy withdrawal of the reactor tube from the heating zone (facilitating rapid cooling). Furthermore, the temperature sensor is positioned in direct contact with the sample holder, ensuring precise temperature monitoring and control of the actual sample.

Detail & Parts

Applications

• RTP rapid heating tube furnaces are designed for fast heating and cooling applications. They are widely used in the following areas:
• Graphene growth: RTP furnaces are used to heat graphene precursors to high temperatures in a controlled atmosphere, promoting graphene growth.
• Temperature sensor calibration: RTP furnaces can be used to calibrate temperature sensors by exposing them to precisely controlled temperatures.
• Material testing: RTP furnaces can be used to test the thermal properties of materials, such as their melting point and thermal conductivity.
• Heat treatment: RTP furnaces can be used to heat treat materials to improve their properties, such as their strength and hardness.
• Annealing: RTP furnaces can be used to anneal materials, which involves heating them to a high temperature and then slowly cooling them to relieve stress and improve their ductility.
• Brazing: RTP furnaces can be used to braze materials together, which involves heating them to a high temperature and melting a filler metal to join them.
• Calcining: RTP furnaces can be used to calcine materials, which involves heating them to a high temperature to drive off volatile components.
• Cleaning: RTP furnaces can be used to clean materials by heating them to a high temperature to remove contaminants.
• Crystal growth: RTP furnaces can be used to grow crystals by heating a material to a high temperature and then slowly cooling it, allowing crystals to form.
• Firing: RTP furnaces can be used to fire materials, which involves heating them to a high temperature to harden and strengthen them.
• Glass: RTP furnaces can be used to melt and anneal glass, which involves heating it to a high temperature and then slowly cooling it to relieve stress and improve its strength.
• Gradient work: RTP furnaces can be used to create temperature gradients, which can be used to study the effects of temperature on materials.
• Laboratory research: RTP furnaces are used in a variety of laboratory research applications, such as materials science, chemistry, and physics.
• Melting: RTP furnaces can be used to melt materials, such as metals and plastics.
• Powders: RTP furnaces can be used to heat and cool powders, which can be used to create new materials or modify the properties of existing materials.

Features

The RTP Rapid heating tube furnace is a versatile and powerful tool for a variety of applications. Here are some of its key features and benefits:

• Rapid heating and cooling: The RTP furnace can heat up to 1000°C in just one minute, and cool down at a rate of up to 110°C per second. This makes it ideal for applications where precise temperature control and fast processing times are essential.
• Precise temperature control: The furnace's temperature sensor is placed in contact with the samples, ensuring accurate and reliable temperature control. This is critical for applications where precise temperature control is essential, such as in the production of semiconductors and other electronic devices.
• Controlled atmosphere environment: The RTP furnace can be equipped with a vacuum pump station to create a controlled atmosphere environment. This is ideal for applications where the presence of oxygen or other gases would be detrimental to the process.
• Easy to use: The RTP furnace is easy to set up and operate, with a user-friendly interface and a variety of programmable settings. This makes it a great choice for both experienced and novice users.

Principle

RTP Heating Tube Furnace principle: The RTP Tube Furnace is designed to reach high target temperatures in a very short time. It achieves rapid cooling by sliding the furnace body away from the tube and insulation chamber. Forced air cooling then accelerates heat dissipation in the ambient environment.

Advantages

• Max. Heating speed is up to 100℃ in one second, it only takes one minute heating to get 1000℃ high temperature
• Max. Cooling speed is up to 110℃ per second,controlled fast circulating air flow will cool down the sample with a supper fast speed
• There is a sliding rail to hold the furnace tube flange, which make it convenient to withdraw the tube out of the furnace heating insulation chamber
• Temperature sensor placed in contact with sample holders, which can get a more precise temperature control and indicating
• Double furnace shell design, forced air flow between the inner and outer shell, so as to keep  a low temperature of the furnace surface 
• PID programmable temperature control,excellent control accuracy and stable heating performance, support remote control and centralized control 
• RTP Pro applies one 7 inches TFT touch screen controller, more friendly program setting and history data analysis,different program recipes can be saved and select

Safety Advantage

• KINTEK tube furnace owns over current protection and over temperature alarming function, furnace will turn off the power automatically once over current detected
• Furnace build in thermal couple detecting function, furnace will stop heating and alarm will be on once thermal couple broken or failure detected
• RTP Pro support power failure restarting function,furnace will resume the furnace heating program when power is incoming after failure

Technical specifications

Standard Package

Optional Setup

• In tube gases detecting and monitoring,like H2, O2 and so on
• Independent furnace temperature monitoring and recording
• RS 485 communication port for PC remote control and data exporting
• Insert gases feeding flow rate control,like mass flowmeter and float flowmeter
• Touch screen temperature controller with versatile operator friendly functions
• High vacuum pump station setups, like vane vacuum pump,molecular pump,diffusion pump

Warnings

Operator safety is the top important issue! Please operate the equipment with cautions. Working with inflammable& explosive or toxic gases is very dangerous, operators must take all necessary precautions before starting the equipment. Working with positive pressure inside the reactors or chambers is dangerous, operator must fellow the safety procedures strictly. Extra caution must also be taken when operating with air-reactive materials, especially under vacuum. A leak can draw air into the apparatus and cause a violent reaction to occur.

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