The range of a vacuum leak test typically measures the leak rate in microns per hour. For critical applications, such as the processing of superalloys or reactive metals, the leak rate should be less than 5 microns/hour. For normal vacuum applications, the acceptable leak rate is generally between 10 to 20 microns/hour.
The leak rate test involves pumping the furnace down to a specified low pressure, typically 1 x 10^-4 torr or better, and then isolating the pumping system from the furnace chamber. The vacuum level is monitored and recorded after 30 minutes and again after 60 minutes. The difference in vacuum levels over this period is used to calculate the leak rate in microns per hour, which is then compared against the acceptance criteria defined by the governing specifications.
This method ensures that the vacuum system maintains its integrity and performance, preventing any significant air or water leaks that could compromise the vacuum level and overall efficiency of the furnace. The use of specific leak detection methods, such as the blowing method or the suction nozzle method with helium mass spectrometers, further enhances the accuracy and reliability of the leak testing process.
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