Vacuum pressure is measured using specialized gauges that are designed to operate in the various ranges of vacuum, from low to ultra-high. The measurement of vacuum pressure is crucial for ensuring the proper functioning of vacuum systems and for maintaining the desired conditions within vacuum chambers.
Measurement Techniques:
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Pressure Gauges: Different types of pressure gauges are used depending on the range of vacuum being measured. For example, in the rough/low vacuum range (1000 to 1 mbar), mechanical gauges like Bourdon tubes or diaphragm gauges might be used. These gauges work on the principle of mechanical deformation in response to pressure changes.
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Thermal Conductivity Gauges: Suitable for fine/medium vacuum ranges (1 to 10^-3 mbar), these gauges measure the change in thermal conductivity of a gas due to pressure changes. The Pirani gauge is a common type, where a heated wire's resistance changes as the gas pressure varies, affecting the wire's heat loss.
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Ionization Gauges: These are used for high and ultra-high vacuum ranges (10^-3 to 10^-11 mbar). They work by ionizing gas molecules and measuring the current produced, which is proportional to the gas density and thus the pressure. Bayard-Alpert gauges and hot cathode ionization gauges are examples.
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Magnetic Suspension Gauges: For extreme high vacuum (< 10^-11 mbar), magnetic suspension gauges measure the force required to suspend a small sphere in a magnetic field, which is influenced by the surrounding gas pressure.
Accuracy and Reliability:
The choice of gauge depends on the vacuum level required and the specific application. For instance, in a vacuum deposition system, as mentioned in the reference, a full-range pressure gauge capable of displaying pressure from atmospheric levels up to 10^-9 Torr is used. This ensures accurate monitoring of the deposition environment, which is critical for the quality of thin film deposition.
Integration with Vacuum Systems:
Vacuum gauges are typically integrated into the vacuum system alongside valves and other components. The gauges provide real-time feedback on the pressure inside the chamber, allowing operators to adjust the vacuum pump settings or other parameters as necessary to achieve and maintain the desired vacuum level.
Conclusion:
Vacuum pressure measurement is a critical aspect of managing vacuum systems across various industries and research applications. The selection of appropriate gauges ensures that the vacuum levels are accurately maintained, which is essential for the success of processes such as vacuum furnaces, particle accelerators, and thin film deposition systems.
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