E-beam evaporation is a physical vapor deposition (PVD) technique. It uses a focused electron beam to heat and vaporize source material within a vacuum environment. This allows for the deposition of thin, high-purity coatings on a substrate.
How does e-beam evaporation work? Explained in 4 Simple Steps
1. Electron Beam Generation
An electric current of high voltage (5-10 kV) is passed through a tungsten filament. This heats it to high temperatures and causes thermionic emission of electrons.
2. Beam Focusing and Targeting
The emitted electrons are focused into a unified beam using magnetic fields. They are then directed towards a crucible containing the material to be evaporated.
3. Material Evaporation
The high-energy electron beam transfers its energy to the material in the crucible. This causes it to evaporate or sublime.
4. Deposition on Substrate
The evaporated material travels through the vacuum chamber. It deposits onto a substrate positioned above the source material, forming a thin, high-purity coating.
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