Chemical Vapor Deposition (CVD) is a complex process used to create thin films on various substrates.
5 Key Steps of CVD Reaction
1) Introduction of Precursor Chemicals
The precursor chemicals are fed into the CVD reactor.
These chemicals are the starting materials that will react to form the desired thin film.
2) Transport of Precursor Molecules
Once inside the reactor, the precursor molecules need to be transported to the substrate surface.
This is typically achieved through a combination of fluid transport and diffusion.
3) Adsorption on the Substrate Surface
The precursor molecules that reach the substrate surface must then undergo adsorption.
Adsorption refers to the attachment of these molecules onto the surface of the substrate.
This step is crucial for the subsequent reactions to occur.
4) Chemical Reactions
Once adsorbed, the precursor molecules react with the substrate surface to form the desired thin film.
These reactions can be either homogeneous gas-phase reactions or heterogeneous reactions that occur on/near the heated surface of the substrate.
5) Desorption of By-products
During the chemical reactions, by-product molecules are formed.
These by-products need to be desorbed from the substrate surface to make room for more incoming precursor molecules.
Desorption refers to the release of these molecules into the gas phase.
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