DC sputtering, also known as Direct Current Sputtering, is a Thin Film Physical Vapor Deposition (PVD) Coating technique.
In this technique, a target material that will be used as the coating is bombarded with ionized gas molecules.
This bombardment causes atoms to be "sputtered" off into the plasma.
These vaporized atoms then condense and deposit as a thin film on the substrate to be coated.
5 Key Points Explained
1. Easy Control and Low Cost
One major advantage of DC sputtering is that it is easy to control and is a low-cost option for metal deposition for coating.
2. Common Applications
It is commonly used for PVD metal deposition and electrically conductive target coating materials.
DC sputtering is extensively employed in the semiconductor industry for creating microchip circuitry on a molecular level.
It is also used for gold sputter coatings on jewelry, watches, and other decorative finishes.
Additionally, it is used for non-reflective coatings on glass and optical components.
3. Technical Specifications
DC sputtering is based on a direct current (DC) power source.
The chamber pressure is typically between 1 to 100 mTorr.
The positively charged ions are accelerated towards the target material.
The ejected atoms deposit on the substrates.
4. Suitable Materials
This technique is commonly used with pure metal sputtering materials such as Iron (Fe), Copper (Cu), and Nickel (Ni) due to its high deposition rate.
5. Challenges with Dielectric Materials
However, it is important to note that the DC sputtering of dielectric materials can cause the vacuum chamber's walls to be coated with a non-conducting material.
This can trap electric charges.
This can lead to the appearance of small and macro arcs during the deposition process.
This can result in uneven removal of atoms from the target material and potential damage to the power supply.
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