The density of plasma matter can vary widely depending on the method of plasma generation and the conditions under which it is created.
Plasma can be characterized by its degree of ionization, which ranges from weakly ionized (like in capacitive plasmas) to fully ionized.
The density of plasma is typically measured in particles per cubic centimeter (cm^-3).
5 Key Factors You Need to Know
1. Low-Density Plasmas
Capacitive plasmas, often used in processes like plasma-enhanced chemical vapor deposition (PECVD), are typically weakly ionized.
In these plasmas, the ionization is limited, leading to lower densities.
The precursors in these plasmas are not highly dissociated, which results in lower deposition rates and overall lower plasma densities.
2. High-Density Plasmas
High-density plasmas can be generated using inductive discharges, where a high-frequency signal induces an electric field within the discharge, accelerating electrons throughout the plasma rather than just at the sheath edge.
This method can achieve much higher plasma densities, which are essential for processes requiring high deposition rates or high levels of dissociation of precursors.
3. Other Techniques for High-Density Plasmas
Electron cyclotron resonance reactors and helicon wave antennas are other techniques used to create high-density discharges.
These methods involve the use of high excitation powers, often 10 kW or more, to generate and sustain the plasma at high densities.
4. DC Discharge in Electron-Rich Environments
Another method to achieve high-density plasmas is through a DC discharge in an electron-rich environment, typically obtained by thermionic emission from heated filaments.
This method results in a high-density, low-energy plasma, which is useful for epitaxial deposition at high rates in Low-Energy Plasma-Enhanced chemical vapor deposition (LEPECVD) reactors.
5. Cold Plasma Density
Cold plasma, or non-equilibrium plasma, is characterized by having electrons at very high temperatures (over 10,000K) while neutral atoms remain at room temperature.
The density of electrons in cold plasma is generally low compared to the density of neutral atoms.
Cold plasmas are typically produced by applying electrical energy to inert gases at room temperature and atmospheric pressure, making them accessible and affordable for various applications.
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