The pressure on a vacuum furnace can vary depending on the material and process being run. Typical partial pressure settings for vacuum heat treatment are in the range of 65 – 200 Pa (500 – 1500 microns). However, the setpoint value can be as low as 13 Pa (100 microns) or as high as 665 Pa (5000 microns) if desired. The pressure increases as the temperature rises and contaminants volatize. Control of the vacuum is usually maintained at about 500 microns in partial pressure processes or below 10-4 TORR in high vacuum processes.
During the cooling phase of the heat treating cycle, the pressure is controlled between 0.85 Barr to 10 Barr depending on the process type. After the cycle is complete, the operator brings the furnace back to atmospheric pressure manually and unloads the product.
Different vacuum furnace designs are available, including batch or continuous furnaces. Mechanical vacuum pumps are used to lower the pressure to around 50 microns, and a diffusion pump is used to lower the pressure to below 1 micron. Some processes may require the introduction of an inert gas, such as argon, to raise the pressure to about 500 microns for partial pressure heat treatment.
Overall, the pressure on a vacuum furnace is carefully controlled to ensure proper heat treatment and prevent any potential issues, such as thermocouple failure due to vapor pressure.
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