Tungsten, molybdenum, and tantalum are metals that can evaporate, particularly useful in thermal evaporation processes due to their high melting points and low vapor pressures. These properties make them ideal for use in evaporation sources, especially in vacuum environments where thin film deposition is required.
Tungsten: Known for its highest melting point among pure metals (3422°C / 6192°F) and lowest vapor pressure above 1650°C (3000°F), tungsten is extensively used in evaporation processes. Its high tensile strength and low coefficient of thermal expansion enhance its suitability for evaporation sources. However, tungsten can alloy with materials like aluminum or gold during evaporation, necessitating the use of alternative materials such as alumina-coated boats or baskets in such cases.
Molybdenum and Tantalum: These metals are also refractory and have high melting points, making them suitable for evaporation processes. They are often used when tungsten is not appropriate or when specific alloying properties are required.
Alloys and Evaporation: Evaporating alloys can be challenging due to the different vapor pressures of their constituent metals. Techniques such as simultaneous melting in separate crucibles or sputtering are employed to manage the evaporation of alloys effectively.
Application in Thin Film Deposition: These metals are crucial in processes like e-beam evaporation, where precise control over the deposition rate and film properties is essential. The ability to deposit thin films with controlled reflection properties is valuable in applications like laser optics and architectural glass.
Equipment Requirements: Evaporation sources, especially those using boats, require high-power electric sources with low voltage and high currents. Multi-strand tungsten filaments and wire baskets are commonly used to evaporate metals and other materials, ensuring that the materials sublime or do not wet the basket during melting.
In summary, metals like tungsten, molybdenum, and tantalum are capable of evaporation, particularly when used in high-temperature, vacuum-based processes for thin film deposition. Their unique properties make them indispensable in various industrial and scientific applications.
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