Knowledge What is Sputtering Equipment? 6 Key Points to Understand
Author avatar

Tech Team · Kintek Solution

Updated 2 months ago

What is Sputtering Equipment? 6 Key Points to Understand

Sputtering equipment is a specialized tool used in the manufacturing process of thin film deposition.

It is primarily used in industries such as semiconductors, disk drives, CDs, and optical devices.

This equipment operates by ejecting atoms from a target material onto a substrate through the bombardment of high-energy particles.

6 Key Points to Understand Sputtering Equipment

What is Sputtering Equipment? 6 Key Points to Understand

1. Vacuum Environment

The sputtering process requires a vacuum environment to minimize the presence of other gases that could interfere with the deposition process.

The vacuum level in a sputtering device is typically higher than that required in other deposition methods like Chemical Vapor Deposition (CVD).

This necessitates a highly effective vacuum system.

2. Inert Gas Introduction

A small amount of inert gas, usually argon, is introduced into the vacuum chamber.

Argon is chosen because it is inert and does not react with the target material or the substrate.

This ensures that the deposition is pure and uncontaminated.

3. Target and Substrate Placement

The target material, which is the source of the atoms to be deposited, and the substrate, where the deposition is to occur, are placed in the chamber.

They are typically positioned opposite each other, with the target material receiving a negative charge to act as a cathode.

4. Voltage Application

Voltage is applied between the target and the substrate, which can be in the form of direct current (DC), radio frequency (RF), or medium frequency.

This voltage ionizes the argon gas, creating argon ions and free electrons.

5. Ionization and Sputtering

The free electrons collide with the argon atoms, ionizing them and creating a plasma.

The positively charged argon ions are then accelerated towards the negatively charged target material due to the electric field.

When these ions collide with the target, they transfer their energy, causing atoms from the target to be ejected.

6. Deposition on Substrate

The ejected atoms travel through the vacuum and deposit onto the substrate, forming a thin film.

This process can be controlled to create films of various materials, including those with high melting points and alloys, which are difficult to deposit using other methods.

Continue exploring, consult our experts

Ready to revolutionize your thin film deposition process? Embrace the precision and purity of KINTEK SOLUTION's state-of-the-art sputtering equipment.

Designed to deliver exceptional performance in the semiconductor, disk drive, and optical device industries.

With our cutting-edge technology, experience unparalleled deposition quality, and elevate your manufacturing capabilities today.

Trust KINTEK SOLUTION for your sputtering equipment needs and discover the difference in every layer you deposit.

Contact us now for a consultation and start your journey to superior thin film production!

Related Products

Spark plasma sintering furnace SPS furnace

Spark plasma sintering furnace SPS furnace

Discover the benefits of Spark Plasma Sintering Furnaces for rapid, low-temperature material preparation. Uniform heating, low cost & eco-friendly.

Electron Gun Beam Crucible

Electron Gun Beam Crucible

In the context of electron gun beam evaporation, a crucible is a container or source holder used to contain and evaporate the material to be deposited onto a substrate.

Electron Beam Evaporation Graphite Crucible

Electron Beam Evaporation Graphite Crucible

A technology mainly used in the field of power electronics. It is a graphite film made of carbon source material by material deposition using electron beam technology.

Vacuum Induction Melting Spinning System Arc Melting Furnace

Vacuum Induction Melting Spinning System Arc Melting Furnace

Develop metastable materials with ease using our Vacuum Melt Spinning System. Ideal for research and experimental work with amorphous and microcrystalline materials. Order now for effective results.

Plasma enhanced evaporation deposition PECVD coating machine

Plasma enhanced evaporation deposition PECVD coating machine

Upgrade your coating process with PECVD coating equipment. Ideal for LED, power semiconductors, MEMS and more. Deposits high-quality solid films at low temps.

Vacuum tube hot press furnace

Vacuum tube hot press furnace

Reduce forming pressure & shorten sintering time with Vacuum Tube Hot Press Furnace for high-density, fine-grain materials. Ideal for refractory metals.

Graphite evaporation crucible

Graphite evaporation crucible

Vessels for high temperature applications, where materials are kept at extremely high temperatures to evaporate, allowing thin films to be deposited on substrates.

Electron Beam Evaporation Coating Oxygen-Free Copper Crucible

Electron Beam Evaporation Coating Oxygen-Free Copper Crucible

Electron Beam Evaporation Coating Oxygen-Free Copper Crucible enables precise co-deposition of various materials. Its controlled temperature and water-cooled design ensure pure and efficient thin film deposition.

Inclined rotary plasma enhanced chemical deposition (PECVD) tube furnace machine

Inclined rotary plasma enhanced chemical deposition (PECVD) tube furnace machine

Introducing our inclined rotary PECVD furnace for precise thin film deposition. Enjoy automatic matching source, PID programmable temperature control, and high accuracy MFC mass flowmeter control. Built-in safety features for peace of mind.

High Purity Carbon (C) Sputtering Target / Powder / Wire / Block / Granule

High Purity Carbon (C) Sputtering Target / Powder / Wire / Block / Granule

Looking for affordable Carbon (C) materials for your laboratory needs? Look no further! Our expertly produced and tailored materials come in a variety of shapes, sizes, and purities. Choose from sputtering targets, coating materials, powders, and more.

Tungsten Titanium Alloy (WTi) Sputtering Target / Powder / Wire / Block / Granule

Tungsten Titanium Alloy (WTi) Sputtering Target / Powder / Wire / Block / Granule

Discover our Tungsten Titanium Alloy (WTi) materials for laboratory use at affordable prices. Our expertise allows us to produce custom materials of different purities, shapes, and sizes. Choose from a wide range of sputtering targets, powders, and more.

Copper Zirconium Alloy (CuZr) Sputtering Target / Powder / Wire / Block / Granule

Copper Zirconium Alloy (CuZr) Sputtering Target / Powder / Wire / Block / Granule

Discover our range of Copper Zirconium Alloy materials at affordable prices, tailored to your unique requirements. Browse our selection of sputtering targets, coatings, powders, and more.

RF PECVD System Radio Frequency Plasma-Enhanced Chemical Vapor Deposition

RF PECVD System Radio Frequency Plasma-Enhanced Chemical Vapor Deposition

RF-PECVD is an acronym for "Radio Frequency Plasma-Enhanced Chemical Vapor Deposition." It deposits DLC (Diamond-like carbon film) on germanium and silicon substrates. It is utilized in the 3-12um infrared wavelength range.

Drawing die nano-diamond coating HFCVD Equipment

Drawing die nano-diamond coating HFCVD Equipment

The nano-diamond composite coating drawing die uses cemented carbide (WC-Co) as the substrate, and uses the chemical vapor phase method ( CVD method for short ) to coat the conventional diamond and nano-diamond composite coating on the surface of the inner hole of the mold.

Vacuum pressure sintering furnace

Vacuum pressure sintering furnace

Vacuum pressure sintering furnaces are designed for high temperature hot pressing applications in metal and ceramic sintering. Its advanced features ensure precise temperature control, reliable pressure maintenance, and a robust design for seamless operation.


Leave Your Message