Thermal evaporation is a widely used physical vapor deposition (PVD) technique for thin film deposition.
This method involves the use of resistive heating at high temperatures in a high vacuum chamber to cause solid material to evaporate and create high vapor pressure.
The evaporated material then coats the surface of the substrate present in the vacuum chamber.
5 Key Points to Know About Thermal Evaporation for Thin Film Deposition
1. Heating the Source Material
Filament Evaporation: This method uses a simple electrical heating element or filament to heat the material to its evaporation point.
The filament's resistance to the electrical current generates the necessary heat.
E-Beam Evaporation: Alternatively, an electron beam is directed at the source material to heat it.
This method is more precise and can handle materials with higher melting points.
2. Evaporation Process
Once the material reaches its evaporation point, it transitions from the solid phase to the gas phase.
This high vapor pressure is maintained in the vacuum chamber, ensuring that the vapor does not condense prematurely.
3. Deposition onto Substrate
The vaporized material travels through the vacuum and deposits onto the substrate.
The substrate is typically kept at a lower temperature to allow the vapor to condense and form a thin film.
The process can be controlled to achieve specific film thicknesses and properties.
4. Applications
Thermal evaporation is used in various industries due to its versatility and effectiveness.
It is particularly useful in creating metal bonding layers in solar cells, thin-film transistors, semiconductor wafers, and carbon-based OLEDs.
The technique can also be used to create co-deposition layers of different materials, enhancing the functionality of the thin films.
5. Advantages of Thermal Evaporation
The technique offers relatively high deposition rates and real-time rate and thickness control.
It also provides good evaporant stream directional control, which is essential for processes like Lift Off to achieve direct patterned coatings.
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