The sputtering process involves the use of specific gases to ensure efficient and effective deposition of materials onto a substrate.
5 Key Gases Explained
1. Argon
Argon is the most common and cost-effective gas used in the sputtering process.
2. Krypton
Krypton is used for sputtering heavy elements due to its heavier atomic weight.
3. Xenon
Xenon, like krypton, is chosen for its ability to efficiently sputter heavy materials.
4. Neon
Neon is preferred for sputtering light elements because of its lighter atomic weight.
5. Reactive Gases (Oxygen and Nitrogen)
Reactive gases like oxygen and nitrogen are used in combination with inert gases to deposit thin films of oxides, nitrides, and other compounds.
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