The gas used in the sputtering process is typically an inert gas, with argon being the most common and cost-effective choice. Other inert gases such as krypton, xenon, neon, and nitrogen are also used, depending on the specific requirements of the sputtering process and the atomic weight of the target material. The choice of gas is crucial for efficient momentum transfer, with lighter gases like neon preferred for sputtering light elements and heavier gases like krypton or xenon used for heavy elements. Additionally, reactive gases such as oxygen and nitrogen can be used in conjunction with inert gases for depositing thin films of oxides, nitrides, and other compounds. The selection of the sputtering gas can significantly influence the deposition rate and the quality of the film or coating on the substrate.
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