A quartz tube can hold a significant amount of pressure. The design tensile strength for fused quartz with good surface quality is in excess of 4.8 x 10^7 Pa (7,000 psi). This means that the quartz tube can withstand pressures up to 4.8 x 10^7 Pa or 7,000 psi without breaking or failing.
In the context of the mentioned LPCVD furnace system, the working pressure is specified as 45,000 psi (310 MPa). This indicates that the quartz tube used in this system is designed to handle pressures up to 45,000 psi without any issues.
Additionally, the vacuum chamber in the deposition system mentioned has the ability to reach a minimum pressure in a short time. The pressure inside the vacuum chamber plays a crucial role in the process of sample coverage and the quality of the thin film deposited. To accurately monitor the pressure inside the chamber, reliable and accurate pressure gauges are used. The pressure gauge used in the mentioned deposition system is capable of displaying pressure in the range of atmosphere pressure up to 10^-9 Torr.
It is also worth noting that maintaining low pressure is important in certain processes to prevent chemical effects on the specimen. For example, in the case of a carbon atmosphere in a vacuum furnace, it is necessary to keep the pressure below 1 or 2 mm to avoid any appreciable chemical effects on the specimen. A refractory porcelain tube closed at one end and suspended from the cool part of the furnace is typically used to protect the sample from carbon vapor or particles. This tube helps to diminish the convention of reducing gases past the specimen, reducing the overall reducing action.
Overall, the specific pressure that a quartz tube can hold depends on its design and quality. In the mentioned references, the quartz tubes are designed to withstand high pressures, with the LPCVD furnace system having a working pressure of 45,000 psi (310 MPa).
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