A vacuum furnace is composed of several key elements, including a sealed furnace shell, electric heating devices, a vacuum system, a power supply system, and a temperature control system. The furnace shell is typically made of carbon steel or stainless steel and is sealed to prevent air leakage. Cooling mechanisms such as water or air cooling are used to prevent the shell from deforming under high temperatures. Inside the furnace, various heating elements such as resistors, induction coils, electrodes, and electron guns are installed, depending on the specific application. For metal melting, crucibles and automatic pouring devices or mechanical arms for material handling are also included. The vacuum system consists of a vacuum pump, vacuum valves, and other components necessary for maintaining the vacuum environment. Additionally, the furnace may use different atmospheres such as vacuum, argon, nitrogen, hydrogen, or other gas mixtures, depending on the process requirements. Heating elements in vacuum furnaces are typically made from materials like graphite, molybdenum, or tungsten, which can withstand high temperatures and maintain low pressures under vacuum conditions.
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