Evaporation materials are substances used to form thin films or coatings on surfaces through the process of evaporation. These materials are heated to a high temperature until they start to vaporize. While in the vacuum environment, the vaporized material goes directly toward the surface of an object, usually a substrate, which is the target to get coated. There, the vaporized material starts to condense and form a thin film on the substrate.
Materials Used in Evaporation: The materials used in evaporation range from pure metals to various compounds such as antimonides, arsenides, borides, carbides, fluorides, nitrides, oxides, selenides, silicides, sulfides, and tellurides. Examples include gold, which is commonly used in optical coatings, and various oxides and nitrides that are crucial in the production of solar cells and sensors.
Purity Levels: The purity levels of evaporation materials are critical and typically range from 99.9% to 99.99999%, depending on the application. High purity is essential to ensure the integrity and performance of the coatings, especially in sensitive applications like optical components and medical devices.
Shapes of Evaporation Materials: Evaporation materials come in various shapes, including chunks, foils, pellets, wires, rods, shots, and slugs. The choice of shape depends on the specific evaporation technique and the ease of handling and heating during the evaporation process.
Thermal Evaporation Techniques: Several techniques are used for thermal evaporation, including:
- Resistive Heating Evaporation: The material is heated in a resistively heated crucible, and the vapor condenses on the substrate.
- Electron Beam Evaporation: An electron beam is focused on the material, causing it to heat rapidly and evaporate.
- Flash Evaporation: The material is quickly heated to its evaporation temperature using a high-current pulse or intense heat source.
- Induction Heating Evaporation: Induction heating induces currents in the source material, leading to heating and evaporation.
Sources of Evaporant: The sources of evaporant include evaporation boats, effusion cells, and crucibles. Evaporation boats, typically made of tungsten or molybdenum, are used to vaporize solid materials using a heating element or electron beam. Effusion cells are used to vaporize liquid or gaseous materials by heating them to a high temperature. Crucibles are used to hold solid materials that are vaporized using a heating element or electron beam.
Deposition Chambers: Deposition chambers are equipped with various evaporation sources, including simple metallic boats and refractory wire heaters, often made of tungsten or molybdenum. For precision evaporation processes, more complex effusion cells with crucibles made of passive materials like boron nitride and external heaters are used. These cells are commonly employed in molecular beam epitaxy, ensuring precise and controlled deposition of materials.
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